P11.Z Piezo Stage, Stroke to 100/300µmCurrent Location:Product Homepage >> X/Z Piezo Nanopositioner>>P11.Z Piezo Stage, Stroke to 100/300µm
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P11.Z is small-volume Z axes piezo nanopositioning stage. It adopts a no-friction flexible hinge guiding mechanism and amplified driving mechanism to ensure 100μm displacement. Closed-loop version could achieve positioning accuracy up to nano-scale. It has excellent control precision, the resolution and stability could reach nanometer level, stabilization time is only milliseconds, the stage is non-magnetic material, and is not affected by the magnetic field in operating.


Characteristics


 Zaxis

 Displacement 100μm,300μm

 Small size

 Quick response

 Nano scale accuracy





Appearance

Moving-part

Amplified-driving

Quick Response Time, Large Stroke

P11 adopts amplified mechanism and built-in high reliability piezo actuator, which could realize precise motion of 100μm. There are open-loop and closed-loop versions. Closed-loop use high-precision sensors to detect and feedback the position in real time. CoreMorrow E00/E01, E52, E53 and other closed-loop piezo controllers could be configured. P11 has very fast response time, and the step time could be up to 0.8ms with E52 piezo controller.

Sensor

Application Case - AFM


Applications


 Nanopositioning

 Quality assurance test

 Biotechnology

 Micromachining / precision control


P11 series


P11.X

P11.Z

P11.XY

P11.XZ

P11.XYZ

    Technical Data

Type

S-Closed loop

K-Open loop

P11.Z100S

P11.Z100K

P11.Z300S

P11.Z300K

Units

Active axes 

Z

Z

 

Travel range(0~120V)

80

240

μm±10%

Travel range(0~150V)

100

300

μm±10%

Sensor

SGS/-

SGS/-

 

Closed/open loop resolution

3/1

8/2.5

nm

Linearity

0.05/-

0.5/-

%F.S.

Repeatability

0.02/-

0.12/-

%F.S.

Pitch/yaw/roll

<10

<10

μrad

Push/pull force

30/10

50/4

N

Stiffness

0.3

0.25

N/μm±20%

Unloaded resonant frequency

0.7

0.12

kHz±20%

Closed/open-loop unloaded 
step time

10/0.8

10/0.8

ms±20%

Closed-loop operating frequency(-3dB)

50(@100g load)

-

Hz±20%

Load capacity

0.8

0.4

kg

El. capacitance

1.8

5.4

μF±20%

Materia

Steel, Aluminum

Steel, Aluminum

 

Mass

100

230

g±5%

Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime.

Technical data are measured by CoreMorrow E00/E01 series piezo controller.

    Drawings(Click on the picture to enlarge it)
    Downlaods
Auto CAD PDF
Step

P11.Z100

P11.Z300

Specs Sheet

P11.Z100

P11.Z300

Manual

     3D diagram presentation
     3D diagram presentation

推荐控制器

E01.D3 Piezo Controller

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Software / Analog input / Rotary konb
Open/closed loop
Ave.current: 291mA


E53 Piezo controller

1 channel
Software / Analog input
Open/closed loop
Ave.current: 60mA


E52 Piezo Controller

1 channel
Analog input
Open/closed loop
Ave.current: 300mA

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