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P11.Z is small-volume Z axes piezo nanopositioning stage. It adopts a no-friction flexible hinge guiding mechanism and amplified driving mechanism to ensure 100μm displacement. Closed-loop version could achieve positioning accuracy up to nano-scale. It has excellent control precision, the resolution and stability could reach nanometer level, stabilization time is only milliseconds, the stage is non-magnetic material, and is not affected by the magnetic field in operating.
Characteristics
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Appearance 
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Moving-part 
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Amplified-driving 
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Quick Response Time, Large Stroke P11 adopts amplified mechanism and built-in high reliability piezo actuator, which could realize precise motion of 100μm. There are open-loop and closed-loop versions. Closed-loop use high-precision sensors to detect and feedback the position in real time. CoreMorrow E00/E01, E52, E53 and other closed-loop piezo controllers could be configured. P11 has very fast response time, and the step time could be up to 0.8ms with E52 piezo controller. |
Sensor 
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Application Case - AFM 
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Applications
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P11 series
| Technical Data | ||||
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Type |
S-Closed loop K-Open loop |
P11.Z100S P11.Z100K |
P11.Z300S P11.Z300K |
Units |
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Active axes |
Z |
Z |
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Drive control |
1 driving channel 1 sensing channel |
1 driving channel |
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Travel range(0~120V) |
80 |
240 |
μm±10% |
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Max.travel range(0~150V) |
100 |
300 |
μm±10% |
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Sensor |
SGS/- |
SGS/- |
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Closed/open loop resolution |
3/1 |
8/2.5 |
nm |
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Linearity |
0.05/- |
0.5/- |
%F.S. |
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Repeatability |
0.02/- |
0.12/- |
%F.S. |
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Pitch/yaw/roll |
<10 |
<10 |
μrad |
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Push/pull force |
30/10 |
50/4 |
N |
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Stiffness |
0.3 |
0.25 |
N/μm±20% |
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Unloaded resonant frequency |
0.7 |
0.12 |
kHz±20% |
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Closed/open-loop unloaded |
10/0.8 |
10/0.8 |
ms±20% |
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Closed-loop operating frequency（-3dB） |
50（@100g load） |
- |
Hz±20% |
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Load capacity |
Horizontal |
0.8 |
0.4 |
kg |
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Vertical |
0.05 | 0.02 | ||
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Inverted |
0.05 | 0.02 | ||
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El. capacitance |
1.8 |
5.4 |
μF±20% |
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Materia |
Steel, Aluminum |
Steel, Aluminum |
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Mass |
100 |
185 |
g±5% |
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Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime.
Technical data are measured by CoreMorrow E00/E01 series piezo controller.
| Mounting Method |
Horizontal Mounting |
Vertical Mounting |
Inverted Mounting |
| Definition |
Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane.
PS: Default direction for carrying capacity in the parameter table
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Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity
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Place the PZT platform horizontally, but the moving surface is located below the PZT platform |
| Diagram |
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| Note |
When the mounting method is selected as vertical mounting, pay attention to the outlet port |
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Tel：0451-86268790
Piezo · Nano · Motion
