In the field of semiconductor, our company offers a variety of piezoelectric ceramic-based solutions, including those for the damping of long-life piezoelectric element , and those for positioning of ultra-high performance long travel nanopositioning ceramics . Other precition motion products include piezoelectric deflection platform for rapid beam stability / angle correction , piezoelectric flexible nano Table for nano-measurement applications , nano-alignment systemt for mask alignment , and the large stroke of the new hybrid nano-positioning table for horizontal and vertical positioning.

Applications	Solutions	Typical Products
Nanoimprint; CD-ROM test; Mask and wafer alignment; Objective precision positioning; Lithography.	Multi-axis piezoelectric system; Nanopositioning stage; Piezo actuators; Nano-focusing system.	Custom 6-axis precision piezoelectric positioning stage; XP-721 objective piezoelectric locator.
Optical interferometry	Closed-loop piezoelectric actuators and flexible guiding system	Custom long travel objective scanner; XP-630 high-precision nanopositioner; XP-620 piezoelectric positioning stages.
Cable splicing	Piezoelectric bender actuators	Piezoelectric bending disk
Optical test / six-axis positioning	Micro-positioning system of six-axis parallel mechanism	N90 Hexapod 6-axis positioning system; Custom long travel Hexapod system.
Large stroke nano-alignment system	Hinge amplified piezoelectric actuator; 1-6 axis piezoelectric flexible positioning stage.	XP-620 piezo positioning stage; N61 Z-direction actuator; Custom 6-axis precision piezoelectric positioning stage; Super large thrust piezoelectric actuator.
Optical beam scanning and stability; Optical path correction.	Fast piezo steering mirrors system	XS-334 micro-piezo deflection mirror; XS-330 high-dynamic piezoelectric deflection mirror.
Active damping	Piezoelectric stack actuators	Large thrust piezoelectric actuator; High-voltage piezoelectric ceramics; Flake-type piezoelectric sensor / actuator.
Longitudinal wafer positioning	Piezoelectric Z/Tip/Tilt deflection stage	XP-541.Z piezoelectric Z-direction and Z/Tip/Tilt positioning stage; Custom 6-axis precision piezoelectric positioning stage; XP-541 Z/Tip/Tilt positioning stage.