- Introduction
- Controllers
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P11.XY is small-volume XY axes piezo nanopositioning stage. It adopts a no-friction flexible hinge guiding mechanism and amplified driving mechanism to ensure 100μm displacement. Closed-loop version could achieve positioning accuracy up to nano-scale. It has excellent control precision, the resolution and stability could reach nanometer level, stabilization time is only milliseconds, the stage is non-magnetic material, and is not affected by the magnetic field in operating.
Characteristics
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Appearance 
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Moving-part 
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Amplified-driving 
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Quick Response Time, Large Stroke P11 adopts amplified mechanism and built-in high reliability piezo actuator, which could realize precise motion of 100μm. There are open-loop and closed-loop versions. Closed-loop use high-precision sensors to detect and feedback the position in real time. CoreMorrow E00/E01, E52, E53 and other closed-loop piezo controllers could be configured. P11 has very fast response time, and the step time could be up to 0.8ms with E52 piezo controller. |
Sensor 
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Application Case - AFM 
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Applications
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P11 series
| Technical Data | |||
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Models |
S-Closed loop
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P11.XY100S P11.XY100K |
Units |
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Active axes |
X,Y |
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Drive control |
2 driving channels 2 sensing channels |
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Travel range(0~120V) |
80/axis |
μm±10% |
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Max.travel range(0~150V) |
100/axis |
μm±10% |
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Integrated sensor |
SGS/- |
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Closed/open loop |
3/1 |
nm |
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Closed-loop linearity |
0.1/- |
%F.S. |
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Repeatability |
0.03/- |
%F.S. |
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Pitch/Yaw/Roll |
<10 |
μrad |
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Push/pull force capacity |
25/10 |
N |
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Stiffness |
X0.25/Y0.3 |
N/μm±20% |
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Unloaded resonant |
X0.2/Y0.3 |
kHz±20% |
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Closed / open-loop |
15/0.8 |
ms±20% |
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Closed-loop operating frequency（-3dB） |
50（unloaded） |
Hz±20% |
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Load capacity |
Horizontal |
0.7 |
kg |
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Vertical |
0.03 | ||
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Inverted |
0.7 | ||
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Electrical capacitance |
1.8/axis |
μF±20% |
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Material |
Steel, Aluminum |
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Mass |
170 |
g±5% |
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Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime.
Technical data are measured by CoreMorrow E00/E01 series piezo controller.
| Mounting Method |
Horizontal Mounting |
Vertical Mounting |
Inverted Mounting |
| Definition |
Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane.
PS: Default direction for carrying capacity in the parameter table
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Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity
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Place the PZT platform horizontally, but the moving surface is located below the PZT platform |
| Diagram |
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| Note |
When the mounting method is selected as vertical mounting, pay attention to the outlet port |
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Piezo · Nano · Motion
