Our company's precision positioning stage and actuator has been in extensive use in many noncontact optical detection system and contact nanometer measurement system.Our company's products feature subnanometer precision, excellent consistency ,and flatness and straightness nanometer to sub-nanometer, which is the premise of the latest technological breakthroughs in these areas.Through the application of advanced digital control method, Scanning linearity can be improved by several orders of magnitude, and the tracking error is reduced to the sub-atomic level.Our company's capacitance nano- measuring sensor can measure the movement of the sub-nanometer range and it has very high bandwidth.
Piezoelectric driven actuator and nanopositioning sensors is also the ideal components of nanoimprinting/micron imprint and nano-tribology/nanomanufacturing experiments.
Applications | Solutions | Typical Products |
|
Scanning interferometry;
White-light
interferometry. |
Objective nanofocusing system;
Piezoelectric scanning stage;
Z-direction phase shifter.
|
XD-721;
|
|
Nanomaterials test;
Nano-tribology;
Nanometer thickness
measurement;
Nanoimprint;
Contact surface
profilometer. |
Voice coil scanner;
Micro-positioning stage;
Piezoelectric linear positioning
stages. |
VS12-series preload piezoelectric
actuator;
XP-614 XY piezoelectric scanner.
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