P11.X is small-volume X axes piezo nanopositioning stage. It adopts a no-friction flexible hinge guiding mechanism and amplified driving mechanism to ensure 100μm displacement. Closed-loop version could achieve positioning accuracy up to nano-scale. It has excellent control precision, the resolution and stability could reach nanometer level, stabilization time is only milliseconds, the stage is non-magnetic material, and is not affected by the magnetic field in operating.
Characteristics
X axis |
Displacement 100μm |
Small size |
Quick response |
Nano scale accuracy |
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Appearance |
Moving-part |
Amplified-driving |
Quick Response Time, Large Stroke P11 adopts amplified mechanism and built-in high reliability piezo actuator, which could realize precise motion of 100μm. There are open-loop and closed-loop versions. Closed-loop use high-precision sensors to detect and feedback the position in real time. CoreMorrow E00/E01, E52, E53 and other closed-loop piezo controllers could be configured. P11 has very fast response time, and the step time could be up to 0.8ms with E52 piezo controller. |
Sensor |
Application Case - AFM |
Applications
Nanopositioning |
Quality assurance test |
Biotechnology |
Micromachining / precision control |
P11 series
Technical Data | |||
Models |
S-Closed loop K-Open loop |
P11.X100S P11.X100K |
Units |
Active axes |
X |
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Drive control |
1 driving channel 1 sensing channel |
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Travel range(0~120V) |
80 |
μm±10% |
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Travel range(0~150V) |
100 |
μm±10% |
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Integrated sensor |
SGS/- |
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Closed/open loop |
3/1 |
nm |
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Closed-loop linearity |
0.05/- |
%F.S. |
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Repeatability |
0.02/- |
%F.S. |
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Pitch/Yaw/Roll |
<10 |
μrad |
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Push/pull force capacity |
30/10 |
N |
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Stiffness |
0.3 |
N/μm±20% |
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Unloaded resonant |
0.3 |
kHz±20% |
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Closed/open - loop |
10/0.8 |
ms±20% |
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Closed-loop operating frequency(-3dB) |
70(@100g load) |
Hz±20% |
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Load capacity |
0.8 |
kg |
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Electrical capacitance |
1.8 |
μF±20% |
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Material |
Steel, Aluminum |
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Mass |
100 |
g±5% |
Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime.
Technical data are measured by CoreMorrow E00/E01 series piezo controller.
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