P11.X Piezo Stage, X Direction, Stroke to 100 µmCurrent Location:Product Homepage >> X/Z Piezo Nanopositioner>>P11.X Piezo Stage, X Direction, Stroke to 100 µm
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P11.X is small-volume X axes piezo nanopositioning stage. It adopts a no-friction flexible hinge guiding mechanism and amplified driving mechanism to ensure 100μm displacement. Closed-loop version could achieve positioning accuracy up to nano-scale. It has excellent control precision, the resolution and stability could reach nanometer level, stabilization time is only milliseconds, the stage is non-magnetic material, and is not affected by the magnetic field in operating.


Characteristics


 X axis

 Displacement 100μm

 Small size

 Quick response

 Nano scale accuracy





Appearance

Moving-part

Amplified-driving

Quick Response Time, Large Stroke

P11 adopts amplified mechanism and built-in high reliability piezo actuator, which could realize precise motion of 100μm. There are open-loop and closed-loop versions. Closed-loop use high-precision sensors to detect and feedback the position in real time. CoreMorrow E00/E01, E52, E53 and other closed-loop piezo controllers could be configured. P11 has very fast response time, and the step time could be up to 0.8ms with E52 piezo controller.

Sensor

Application Case - AFM


Applications


 Nanopositioning

 Quality assurance test

 Biotechnology

 Micromachining / precision control


P11 series


P11.X

P11.Z

P11.XY

P11.XZ

P11.XYZ

    Technical Data

Models

S-Closed loop

K-Open loop

P11.X100S

P11.X100K

Units

Active axes

X

 

Travel range(0~120V)

80

μm±10%

Travel range(0~150V)

100

μm±10%

Integrated sensor

SGS/-

 

Closed/open loop
resolution

3/1

nm

Closed-loop linearity

0.05/-

%F.S.

Repeatability

0.02/-

%F.S.

Pitch/Yaw/Roll

<10

μrad

Push/pull force capacity

30/10

N

Stiffness

0.3

N/μm±20%

Unloaded resonant
frequency

0.3

kHz±20%

Closed/open - loop
unloaded Step time

10/0.8

ms±20%

Closed-loop operating frequency(-3dB)

70(@100g load)

Hz±20%

Load capacity

0.8

kg

Electrical capacitance

1.8

μF±20%

Material

Steel, Aluminum

 

Mass

100

g±5%

Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime.

Technical data are measured by CoreMorrow E00/E01 series piezo controller.

    Drawings(Click on the picture to enlarge it)
     Downloads
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Step

Specs Sheet
Manual
     3D diagram presentation

推荐控制器

E01.D3 Piezo Controller

1 channel
Software / Analog input / Rotary konb
Open/closed loop
Ave.current: 291mA


E53 Piezo controller

1 channel
Software / Analog input
Open/closed loop
Ave.current: 60mA


E52 Piezo Controller

1 channel
Analog input
Open/closed loop
Ave.current: 300mA

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