- Introduction
- Controllers
- Feedback
P78 piezo scanner is ideal for applications such as nanoscale alignment and measurement. Closed-loop sensor with bridge configuration can be selected to eliminate temperature drift and ensure the positioning stability in the nanometer range.
Characteristics
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Appearance 
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Moving Part 
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Amplified-driving 
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Long Travel, High Resolution
P78 adopts amplification mechanism to realize stroke of 187.5/262.5μm. Excellent flexible hinge guiding mechanism is optimized by FEA to achieve nanometer resolution and millisecond response time. |
Freqency VS Load Curve 
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Applications
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P78 series
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| Technical data | |||
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Models |
S-Closed loop K-open loop |
P78.Z300S P78.Z300K |
Units |
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Active axis |
Z |
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Drive control |
1 driving channel 1 sensing channel |
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Travel range(0 ~120 V) |
210 |
µm±20% |
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Travel range(0~150 V) |
262.5 |
µm±20% |
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Sensor type |
SGS/- |
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Aperture size |
64×64 |
mm |
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Resolution |
7/2.5 |
nm |
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Linearity |
0.15/- |
%F.S. |
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Repeatability |
0.1/- |
%F.S. |
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Pitch/yaw/roll |
<30 |
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Push/pull force |
30/5 |
N |
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Stiffness |
0.15 |
N/μm±20% |
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Unloaded resonant frequency |
200 |
Hz±20% |
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Unloaded step time |
50/6.4 |
ms |
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Load capacity |
Horizontal |
0.5 |
kg |
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Vertical |
0.01 | ||
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Inverted |
0.1 | ||
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El.capacitance |
14.4 |
μF±20% |
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Operating temperature |
-20~80 |
℃ |
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Material |
Aluminum |
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Mass |
340 |
g±5% |
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Cable length |
1.5 |
m±10mm |
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Sensor/voltage connector |
LEMO |
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Note: Above parameters are measured with the E00/E01 series piezo controller. The maximum driving voltage can be -20V~150V; for high reliability long-term use, the recommended driving voltage is 0~120V.
| Mounting Method |
Horizontal Mounting |
Vertical Mounting |
Inverted Mounting |
| Definition |
Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane.
PS: Default direction for carrying capacity in the parameter table
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Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity
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Place the PZT platform horizontally, but the moving surface is located below the PZT platform |
| Diagram |
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| Note |
When the mounting method is selected as vertical mounting, pay attention to the outlet port |
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Piezo · Nano · Motion
