P78 piezo scanner is ideal for applications such as nanoscale alignment and measurement. Closed-loop sensor with bridge configuration can be selected to eliminate temperature drift and ensure the positioning stability in the nanometer range.
Characteristics
Z motion |
Travel range to 187.5µm |
Resolution to 1.5nm |
Aperture 64×64mm |
Appearance |
Moving Part |
Amplified-driving |
Long Travel, High Resolution
P78 adopts amplification mechanism to realize stroke of 187.5/262.5μm. Excellent flexible hinge guiding mechanism is optimized by FEA to achieve nanometer resolution and millisecond response time. |
Freqency VS Load Curve |
Applications
Microscopic imaging |
Biotechnology |
Super-resolution microscopy |
3D imaging |
Interferometry |
Measurement techniques |
Autofocus systems |
P78 series
|
|
|
||
|
|
|
Technical data | |||
Models |
S-Closed loop K-open loop |
P78.Z200S P78.Z200K |
Units |
Active axis |
Z |
|
|
Drive control |
1 driving channel 1 sensing channel |
|
|
Travel range(0 ~120 V) |
150 |
µm±20% |
|
Travel range(0~150 V) |
187.5 |
µm±20% |
|
Sensor type |
SGS/- |
|
|
Aperture size |
64×64 |
mm |
|
Resolution |
5/1.5 |
nm |
|
Linearity |
0.1/- |
%F.S. |
|
Repeatability |
0.05/- |
%F.S. |
|
Pitch/yaw/roll |
<20 |
|
|
Push/pull force |
50/8 |
N |
|
Stiffness |
0.35 |
N/μm±20% |
|
Unloaded resonant frequency |
270 |
Hz±20% |
|
Unloaded step time |
15/3.2 |
ms |
|
Load capacity |
1 |
kg |
|
El.capacitance |
14.4 |
μF±20% |
|
Operating temperature |
-20~80 |
℃ |
|
Material |
Aluminum |
|
|
Mass |
340 |
g±5% |
|
Cable length |
1.5 |
m±10mm |
|
Sensor/voltage connector |
LEMO |
Note: Above parameters are measured with the E00/E01 series piezo controller. The maximum driving voltage can be -20V~150V; for high reliability long-term use, the recommended driving voltage is 0~120V.
|
|
|