P78.Z200 Piezo Scanners, 187.5μm, Aperture 64×64mmCurrent Location:Product Homepage >> X/Z Piezo Nanopositioner>>P78.Z200 Piezo Scanners, 187.5μm, Aperture 64×64mm
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P78 piezo scanner is ideal for applications such as nanoscale alignment and measurement. Closed-loop sensor with bridge configuration can be selected to eliminate temperature drift and ensure the positioning stability in the nanometer range.


Characteristics


 Z motion

 Travel range to 187.5µm

 Resolution to 1.5nm

 Aperture 64×64mm


Appearance

Moving Part

Amplified-driving

Long Travel, High Resolution

P78 adopts amplification mechanism to realize stroke of 187.5/262.5μm. Excellent flexible hinge guiding mechanism is optimized by FEA to achieve nanometer resolution and millisecond response time.
Aperture in the center is 64×64mm, which is suitable for applications such as interference and surface inspection.

Freqency VS Load Curve


Applications


 Microscopic imaging

 Biotechnology

 Super-resolution microscopy

 3D imaging

 Interferometry

 Measurement techniques

 Autofocus systems


P78 series


 

 

 

P78.Z200

P78.Z300

 

 

 

    Technical data

Models

S-Closed loop  

K-open loop

P78.Z200S

P78.Z200K

Units

Active axis

Z

 

Drive control

1 driving channel 1 sensing channel

 

Travel range(0 ~120 V)

150

µm±20%

Travel range(0~150 V)

187.5

µm±20%

Sensor type

SGS/-

 

Aperture size

64×64

mm

Resolution

5/1.5

nm

Linearity

0.1/-

%F.S.

Repeatability

0.05/-

%F.S.

Pitch/yaw/roll

<20

 

Push/pull force

50/8

N

Stiffness

0.35

N/μm±20%

Unloaded resonant frequency

270

Hz±20%

Unloaded step time

15/3.2

ms

Load capacity

1

kg

El.capacitance

14.4

μF±20%

Operating temperature

-20~80

Material

Aluminum

 

Mass

340

g±5%

Cable length

1.5

m±10mm

Sensor/voltage connector

LEMO

Note: Above parameters are measured with the E00/E01 series piezo controller. The maximum driving voltage can be -20V~150V; for high reliability long-term use, the recommended driving voltage is 0~120V.

    Drawings(Click on the picture to enlarge it)
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Step
Specs Sheet
Manual
     3D diagram presentation

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