P73 Piezo Objective Scanners, 500μm strokeCurrent Location:Product Homepage >> Piezo Objective Scanner>>P73 Piezo Objective Scanners, 500μm stroke
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P73 series piezoelectric objective scanner features a large of 200μm, 500μm, 1000μm in Z direction. It also adopts flexible hinge design mechanism, no friction, good linearity and high positioning accuracy. The seperate thread adapter design can be adapted to a wide range of microscopes and is widely used in long-travel scanning of microscopic imaging, two-photon microscopy and other fields.


Characteristics


 Optional travels of 200/500/1000μm

 Load capacity to 0.2kg or 0.4kg

 Millisecond response time

 Closed loop for higher repeatability

 Excellent focus stability





Appearance

Moving-part

Match brands/sizes of objectives

Thread Adapter for Easy Integration

P73 series objective positioner is connected to the objective lens through an adapter to quickly make the objective lens in the desired position. A variety of thread adapters are available, such as M27×0.75, M26×0.75, M26×1/36", M25×0.75, W0.8×1/36", etc., which can also be customized for easy integration with the microscope.

Frequency and Load Curve

Surface Analysis

Adjustable response time

Driving and Control

Closed-Loop Curve


Applications


 Adjustment focus

 Image processing

 Confocal microscope

 Semiconductor inspection

 Laser processing

  Interference shape measurement



    Technical data

Models

S-Closed loop

K-Open loop

P73.Z200S

P73.Z200K

P73.Z500S

P73.Z500K

P73.Z1000S

P73.Z1000K

Units

Active axis

Z

Z

Z

 

Drive control

1 driving channel 

1 sensing channel

1 driving channel 

1 sensing channel

1 driving channel 

1 sensing channel

 

Travel range0~120V

160

400

800

μm±10%

Travel range0~150V

200

500

1000

μm±10%

Sensor

SGS/-

SGS/-

SGS/-

 

Closed/open loop resoluiton

5.5/2

14/4

36/8

nm

Linearity

0.1/-

0.1/-

0.5/-

%F.S.

Repeatability

0.05/-

0.05/-

0.3/-

%F.S.

Push/pull force

80/10

80/10

20/5

N

Stiffness

0.25

0.2

0.02

N/μm±20%

Unloaded resonant frequency

210

170

110

Hz±20%

Closed/open loop unloaded step time

20/10

120@200g/10

150/25

ms±20%

Load

0.2

0.4

0.2

kg

Capacitance

7.2

14

43.2

μF±20%

Material

Steel, Al

Steel, Al

Steel, Al

 

Mass

210

300

786

g±5%

Linearity curve

 

Displacement vs Voltage Curve

 

Note: Above parameters are measured with the E00/E01 series piezo controller. The maximum driving voltage can be -20V~150V; for high reliability long-term use, the recommended driving voltage is 0~120V.

    P73.Z200 Drawings(Click on the picture to enlarge it)
     Downloads
Auto CAD PDF

Step

Specs Sheet
Manual
    P73.Z500 Drawings(Click on the picture to enlarge it)
     Downloads
Auto CAD PDF

Step


Specs Sheet
Manual
    P73.Z1000 Drawings(Click on the picture to enlarge it)
     Downloads
Auto CAD PDF

Step

Specs Sheet
Manual
    Product Motion Video


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