P76 series piezoelectric objective scanner features a large load capacity up to 900g, Z-axis linear motion range up to 200μm, adopting flexible hinge design mechanism, no friction, good linearity, high closed-loop positioning accuracy. The seperate thread adapter design accommodates a wide range of microscopes.
Characteristics
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Appearance ![]() |
Moving Part ![]() |
Match brands/sizes of objectives ![]() |
Adjustable response time ![]() |
Driving and Control ![]() |
Closed-Loop Curve ![]() |
Applications
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Technical data | ||||||||
Models |
S-Closed loop |
P76.Z50S P76.Z50K |
P76.Z70S P76.Z70K
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P76.Z80S P76.Z80K |
P76.Z100S P76.Z100K |
P76.Z150S44
P76.Z150K44
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P76.Z200S P76.Z200K |
Units |
Active axes |
Z | Z | Z | Z | Z | Z |
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Drive control |
1 driving channel 1 sensing channel |
1 driving channel 1 sensing channel |
1 driving channel 1 sensing channel |
1 driving channel 1 sensing channel |
1 driving channel 1 sensing channel |
1 driving channel 1 sensing channel |
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Travel range(0~120V) |
40 |
60 |
64 |
80 |
108 |
160 |
μm±10% |
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Max.travel range(0~150V) |
50 |
75 |
80 |
100 |
135 |
200 |
μm±10% |
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Sensor type |
SGS/- |
SGS/- |
SGS/- |
SGS/- |
SGS/- |
SGS/- |
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Resolution |
1.5/0.5 |
2/1 |
3/1 |
3/1 |
5/1.5 |
5.5/2 |
nm |
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Linearity |
0.03/- |
0.03/- |
0.03/- |
0.03/- |
0.03/- |
0.03/- |
%F.S. |
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Repeatability |
0.02/- |
0.02/- |
0.02/- |
0.02/- |
0.06/- |
0.02/- |
%F.S. |
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Push/pull force |
35/10 |
180/16 |
- |
70/10 |
- |
- |
N |
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Stiffness |
0.8 |
3 |
- |
0.8 |
- |
- |
N/μm±20% |
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Unloaded resonant frequency |
800 |
1800 |
1700 |
800 |
890 |
900 |
Hz±20% |
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Closed-loop operating frequency(-3dB) |
- |
- |
- |
160(unloaded) |
- |
- |
Hz±20% |
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Unloaded step time |
5/2 |
1.6/1 |
15@24μm、900g/- |
5/2 |
25@500g/10 |
10/4 |
ms±20% |
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Load capacity |
0.5 |
0.5 |
0.9 |
0.5 |
0.5 |
0.5 |
kg |
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El.capacitance |
3.2 |
7.2 |
14.4 |
7.2 |
19.2 |
28.8 |
μF±20% |
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Material |
Steel |
Steel, Al |
Steel, Al |
Steel, Al |
Al,Ti |
Steel, Al |
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Mass |
430 |
520 |
765 |
500 |
525(including wires and connectors) |
740 |
g±5% |
Note: Above parameters are measured with the E00/E01 series piezo controller. The maximum driving voltage can be -20V~150V; for high reliability long-term use, the recommended driving voltage is 0~120V.
Experimental Results of Operating Frequency vs Travel(For Reference only)
P76.Z100S piezo objective scanner is drived by E52.B1S-I3 piezo controller(300mA) | |
Travel |
Max. operating frequency |
50μm |
60Hz |
80μm |
35Hz |
100μm |
25Hz |
Note:Above specs are measured under the condition of room temperature, loading 250g load, no travel attenuation and sine wave driving. For Reference only. |
P76.Z70S is drived by E52.B1S-H piezo controller(Ave.current 237mA) | |
Travel |
Max.operating frequency |
0.5μm |
300Hz |
1μm |
250Hz |
2μm |
250Hz |
5μm |
250Hz |
10μm |
200Hz |
20μm |
150Hz |
50μm |
90Hz |
60μm |
70Hz |
70μm |
60Hz |
Note:Above specs are measured under the condition of room temperature, loading 250g load, no travel attenuation. For Reference only. |
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