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P12.XYZ100 is XY-axes scanning stage. The aperture diameter could be selected as 25mm(35mm is optional), which is suitable for applications such as microscopy. The piezo scanner could realize single-axis displacement of 100μm. Integrated structure makes multi-dimensional motion uncoupled and could be selected in various specifications to meet the needs of different applications.
Characteristics
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Appearance 
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P12.X-D3 moving part 
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Amplified-driving 
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1~3 - Axis Scanning Stage P12 piezo nanopositioning stage is a 1~3-axis linear piezo scanning stage, including X, Z, XY, XZ, XYZ motion versions. A variety of specifications and models for choice with optional aperture diameter of 25mm or 35mm. |
Freqency VS Load Curve 
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Application case-Inverted Piezo Scanner 
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Applications
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| Technical data | |||||
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Models |
S-Closed loop K-Open loop |
P12.Z100S P12.Z100K |
P12.Z200S P12.Z200K |
P12.Z300S P12.Z300K |
Units |
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Active axes |
Z |
Z |
Z |
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Drive control |
1 driving channel 1 sensing channel |
1 driving channel 1 sensing channel |
1 driving channel 1 sensing channel |
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Travel range(0~120V) |
80 |
160 |
240 |
μm±20% |
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Travel range(0~150V) |
100 |
200 |
300 |
μm±20% |
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Integrated sensor |
SGS/- |
SGS/- |
SGS/- |
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Aperture |
Ø25/Ø35 |
Ø25/Ø35 |
Ø25/Ø35 |
mm |
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Closed/open loop resolution |
3/1 |
5.5/2 |
8/2.5 |
nm |
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Closed-loop linearity |
0.05/- |
0.1/- |
0.15/- |
%F.S |
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Repeatability |
0.02/- |
0.05/- |
0.1/- |
%F.S |
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Pitch/Yaw/Roll |
<10 |
<15 |
<15 |
μrad |
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Push/pull force capacity |
30/10 |
30/10 |
30/10 |
N |
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Stiffness |
0.3 |
0.2 |
0.1 |
N/μm±20% |
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Unloaded resonant frequency |
220 |
150 |
100 |
Hz±20% |
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Closed/open-loop unloaded Step time |
10/0.8 |
15/1.6 |
30/2.4 |
ms±20% |
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Closed-loop operating frequency（-3dB） |
- |
- |
- |
Hz±20% |
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Load capacity |
0.8 |
0.5 |
0.4 |
kg |
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Electrical capacitance |
1.8 |
3.6 |
5.4 |
μF±20% |
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Material |
Steel, Aluminum |
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Mass |
140 |
200 |
260 |
g±5% |
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Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime.
Technical data are measured by CoreMorrow E00/E01 series piezo controller.
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Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
