- Introduction
- Feedback
Capacitive displacement measurement system is a non-contact displacement measuring instrument, which consists of a capacitive sensing probe and a sensing and power supply module. It can measure small displacements within the range of 0-1mm with a measurement accuracy of up to nanometer level.
Characteristics
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Principle It is based on the principle of an ideal parallel plate capacitor.The sensor and the measured target on the opposite side form two electrodes. The principle of guard ring capacitor is used to ensure that the sensor is still linear when measuring any metal. 
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Composition CoreMorrow can provide capacitive sensing probe with multiple ranges, with a measurement range of 100μm to 1mm available. It can be used in combination with any of sensing and power supply modules from the E09 chassis type, the E09 board type, or compact E75. |
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Model Naming Rules |
Model Naming Rules |
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E09 Chassis Type 
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E09 Board Type(no power supply) 
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Compact E75 |
Typical Applications
The capacitive displacement measurement system of CoreMorrow is suitable for high-precision positioning, angle/linear vibration measurement, thickness detection (film thickness measurement, wafer thickness measurement, brake disc thickness measurement, oil film thickness measurement, etc.), rotating machinery clearance measurement, jumping measurement (shaft jumping measurement, etc.), automatic focusing or zeroing, dielectric constant measurement, astronomical telescope lens positioning, outer diameter measurement, deformation measurement, etc.
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| Vibration, amplitude, gap, beating | Deflection, deformation, waviness, inclination | Distortion, deformation, axial vibration | Displacement, distance, position, elongation |
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| Size, tolerance, identification | Insulator thickness measurement | Online inspection, size inspection | Double-sided thickness detection |
Double-sided thickness detection
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| Magnetic stand | Test stand |
| Technical data | |||||||||
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No. |
Type |
Measuring range [μm] |
Channels |
The parameter of the capacitive probe |
The sensing and power supply modules |
Page |
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Type |
Resolution
[nm]
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Linearity
[nm]
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Repeatability
[nm]
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1 |
E01.CapX[1]-100 |
0~100 |
1~6 |
C01D10 |
1.25 |
50 |
2.5 | Chassis-type | |
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2 |
E01.CapX[1]-200 |
0~200 |
1~6 |
C02D10 |
2.5 |
100 |
5 |
Chassis-type |
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3 |
0~200 |
1~6 |
C02F13 |
2.5 |
100 |
5 |
Chassis-type |
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4 |
E01.CapX[1]-500 |
0~500 |
1~6 |
C05D10 |
5 |
200 |
10 |
Chassis-type |
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5 |
E01.CapX[1]-1000 |
0~1000 |
1~6 |
C1D10 |
10 |
400 |
20 |
Chassis-type |
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6 |
E00.CapX[2]-100 |
0~100 |
7~12 |
C01D10 |
1.25 |
50 |
2.5 |
Chassis-type |
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7 |
E00.CapX[2]-200 |
0~200 |
7~12 |
C02D10 |
2.5 |
100 |
5 |
Chassis-type |
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8 |
0~200 |
7~12 |
C02F13 |
2.5 |
100 |
5 |
Chassis-type |
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9 |
E00.CapX[2]-500 |
0~500 |
7~12 |
C05D10 |
5 |
200 |
10 |
Chassis-type |
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10 |
E00.CapX[2]-1000 |
0~1000 |
7~12 |
C1D10 |
10 |
400 |
20 |
Chassis-type |
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11 |
E75.Cap1-100 |
0~100 |
1 |
C01D10 |
1.25 |
50 |
2.5 | Compact-type | |
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12 |
E75.Cap1-200 |
0~200 |
1 |
C02D10 |
2.5 |
100 |
5 |
Compact-type |
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13 |
0~200 |
1 |
C02F13 |
2.5 |
100 |
5 |
Compact-type |
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14 |
E75.Cap1-500 |
0~500 |
1 |
C05D10 |
5 |
200
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10 |
Compact-type |
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15 |
E75.Cap1-1000 |
0~1000 |
1 |
C1D10 |
10 |
400 |
20 |
Compact-type |
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16 |
E09.Cap1-100 |
0~100 |
1 |
C01D10 |
1.25 |
50 |
2.5 | Board-type, without power supply modules | |
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17 |
E09.Cap1-200 |
0~200 |
1 |
C02D10 |
2.5 |
100
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5 |
Board-type, without power supply modules |
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18 |
0~200 |
1 |
C02F13 |
2.5 |
100 |
5 |
Board-type, without power supply modules |
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19 |
E09.Cap1-500 |
0~500 |
1 |
C05D10 |
5 | 200 | 10 |
Board-type, without power supply modules |
Click to view |
| 20 |
E09.Cap1-1000 |
0~1000 |
1 |
C1D10 |
10 | 400 | 20 |
Board-type, without power supply modules |
Click to view |
Note:
[1]:The X represents the number of channels, ranging from 1 to 6；
[2]:The X represents the number of channels, ranging from 7 to 12；
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Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
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