Chassis Type Capacitive Displacement Measurement System- 200μm range (E00 chassiCurrent Location:Product Homepage >> Cap Type>>Chassis Type Capacitive Displacement Measurement System- 200μm range (E00 chassi
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The capacitive displacement measurement system is a non-contact displacement measuring instrument, which consists of a capacitive sensing probe and a sensing and power supply module. It can measure small displacements within the range of 0-1mm with a measurement accuracy of up to nanometer level.



Characteristics


 Measuring range: 0~200μm

 Static resolution: 2.5nm

 Repeatability : 5nm

 7~12 channels optional

 Square capacitive sensing probe





Principle

It is based on the principle of an ideal parallel plate capacitor. The sensor and the measured target on the opposite side form two electrodes.The principle of guard ring capacitor is used to ensure that the sensor is still linear when measuring any metal.


Typical Applications






Vibration, amplitude, gap, beating Deflection, deformation, waviness, inclination Distortion, deformation, axial vibration Displacement, distance, position, elongation




Size, tolerance, identification Insulator thickness measurement Online inspection, size inspection Double-sided thickness detection
  技术参数

Type

E00.CapX-200

Units

Capacitive probe

 Channels

7~12 optional


 Type

C02F13


 Measuring range

0~200

μm

 Static resolution

2.5

nm

 Dynamic resolution(1kHz)

100

nm

 Linearity

100

nm

 Repeatability

5

nm

 Sensor diameter

9

mm

 Minimum target diameter

9

mm

 Sensor wire length

2

m

 Installation

Radial clamping


 Probe size

13×13×4.3

mm

 Mass(wires and connectors included)

33

g

Sensing and Signal Processing

 Type
E09.Cap1-100


 Sensor type

CAP


 Sensor channels

1


 The numbers of module
7~12 (depending on the number of channels)


 Static resolution

0.00125

%F.S.

Dynamic resolution(2kHz) 0.05 %F.S.
Analog signal output speed 2 kHz
Absolute error
±0.2
%F.S.
Linearity
0.05 %F.S.
Repeatability
0.0025 %F.S.
Signal temperature stability
<0.005
%FSO/℃
Long-term stability
<0.004
%FSO/month
Bandwidth
2 kHz(-3dB)
Operating temperature
-10~+50

Storage temperature 
-10~+75

Ambient humidity
<85
%
Sensor output interface
BNC
Voltage output range(analog)
0~10
V
Power supply
AC 220V±10%,50Hz±10%

Size(L×H×D)
500×175 ×375

mm

Mass ≈12
kg±5%

     Note: In the model E00.CapX-200, the X represents the number of channels, ranging from 7 to 12. Preheating time is about 30 minutes.




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