Compact Capacitive Displacement Measurement System-500μm range, 1 output channelCurrent Location:Product Homepage >> Cap Type>>Compact Capacitive Displacement Measurement System-500μm range, 1 output channel
  • Introduction
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        The capacitive displacement measurement system is a non-contact displacement measuring instrument, which consists of a capacitive sensing probe and a sensing and power supply module. It can measure small displacements within the range of 0-1mm with a measurement accuracy of up to nanometer level.


Characteristics


 Measuring range: 0~500μm

 Static resolution: 5nm

 Repeatability: 10nm

 1 output channel


Principle

It is based on the principle of an ideal parallel plate capacitor. The sensor and the measured target on the opposite side form two electrodes.The principle of guard ring capacitor is used to ensure that the sensor is still linear when measuring any metal.


Typical Applications






Vibration, amplitude, gap, beating Deflection, deformation, waviness, inclination Distortion, deformation, axial vibration Displacement, distance, position, elongation




Size, tolerance, identification Insulator thickness measurement Online inspection, size inspection Double-sided thickness detection
  Technical data

Type

E75.Cap1-500

Units

Channels
1
Capacitive probe

 Type

C05D10


 Measuring range

0~500

μm

 Static resolution

5

nm

 Dynamic resolution(1kHz)

200

nm

 Linearity

200

nm

 Repeatability

10

nm

 Sensor diameter

10

mm

 Minimum target diameter

10

mm

 Sensor wire length

1.5

m

 Installation

Radial clamping


 Probe size

Φ10×18.5

mm

 Mass(wires and connectors included)

55

g

Sensor signal processing and power supply

 Type
E75.CapA1-H


 Sensor type

CAP


 Sensor channels

1


 Static resolution

0.00125

%F.S.

Dynamic resolution(2kHz) 0.05 %F.S.
Analog signal output speed 2 kHz
Absolute error
±0.2
%F.S.
Linearity
0.05 %F.S.
Repeatability
0.0025 %F.S.
Signal temperature stability
<0.005
%FSO/℃
Long-term stability
<0.004
%FSO/month
Bandwidth
2 kHz(-3dB)
Operating temperature
-10~+50

Storage temperature
-10~+75

Ambient humidity
<85
%
Power supply
24V DC/±50mA
V
Voltage output range(analog)
0~10
V
Sensor output interface
SMA
Size(L×W×D)
105×26 ×66

mm

Mass 180
g±5%

      Note: Preheating time is about 30 minutes.




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