The capacitive displacement measurement system is a non-contact displacement measuring instrument, which consists of a capacitive sensing probe and a sensing and power supply module. It can measure small displacements within the range of 0-1mm with a measurement accuracy of up to nanometer level.
Characteristics
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Principle It is based on the principle of an ideal parallel plate capacitor. The sensor and the measured target on the opposite side form two electrodes.The principle of guard ring capacitor is used to ensure that the sensor is still linear when measuring any metal. ![]() |
Typical Applications
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Vibration, amplitude, gap, beating | Deflection, deformation, waviness, inclination | Distortion, deformation, axial vibration | Displacement, distance, position, elongation |
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Size, tolerance, identification | Insulator thickness measurement | Online inspection, size inspection | Double-sided thickness detection |
Technical data | |||
Type |
E75.Cap1-100 |
Units |
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Channels |
1 |
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Capacitive probe |
Type |
C01D10 |
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Measuring range |
0~100 |
μm |
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Static resolution |
1.25 |
nm |
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Dynamic resolution(1kHz) |
50 |
nm |
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Linearity |
50 |
nm |
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Repeatability |
2.5 |
nm |
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Sensor diameter |
10 |
mm |
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Minimum target diameter |
10 |
mm |
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Sensor wire length |
1.5 |
m |
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Installation |
Radial clamping |
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Probe size |
Φ10×18.5 |
mm |
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Mass(wires and connectors included) |
55 |
g |
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Sensor signal processing and power supply |
Type
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E75.CapA1-H |
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Sensor type |
CAP |
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Sensor channels |
1 |
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Static resolution |
0.00125 |
%F.S. |
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Dynamic resolution(2kHz) | 0.05 |
%F.S. |
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Analog signal output speed | 2 |
kHz |
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Absolute error |
±0.2 |
%F.S. |
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Linearity |
0.05 |
%F.S. |
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Repeatability |
0.0025 |
%F.S. |
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Signal temperature stability |
<0.005 |
%FSO/℃ |
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Long-term stability |
<0.004 |
%FSO/month |
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Bandwidth |
2 |
kHz(-3dB) |
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Operating temperature |
-10~+50 |
℃ |
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Storage temperature |
-10~+75 |
℃ |
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Ambient humidity |
<85 |
% | |
Power supply |
24V DC/±50mA |
V | |
Voltage output range(analog) |
0~10 |
V | |
Sensor output interface |
SMA |
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Size(L×W×D) |
105×26 ×66 |
mm |
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Mass |
180 |
g±5% |
Note: Preheating time is about 30 minutes.