P93.X100 Fast Tool Positioning Stage, X Direction, Stroke to 118µmCurrent Location:Product Homepage >> Fast Tool Positioning Stage>>P93.X100 Fast Tool Positioning Stage, X Direction, Stroke to 118µm
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P92 could realize max stroke to 118μm. It could be equipped with LVDT sensor or CAP sensor. The sensor outputs 0-10V voltage signal corresponding to the 0μm to full stroke of the stage.


Characteristics


 Ultra high precision

 Large load capacity

 Quick response time

 High stiffness

 Travel range to 118µm





Dust and Droplet Proof On Request

Fast tool stage is dust- and drip-resistant, allowing it to work in humid environments. The stage body material is made of stainless steel to ensure the stability during processing, the structure is stable and reliable, and the machining accuracy is not affected by the vibration.
The stiffness of the fast tool positioning stage is much greater than the conventional piezo nanopositioning stage.

Large Blocking Force

Blocking force of piezo actuator in fast tool positioning stage is several times of other piezo actuator in piezo stage.

Closed loop Resolution

Unlike vibration machining, the tool position could be feedback controlled by sensor for nanometer resolution.

Customized Macro Micro Stage

Freqency VS Load Curve


Applications


 Diamond bit feed

 Precision processin

 High speed tool control

 Precision machining and grinding

    Technical data

Models

C/L-Closed loop

P93.X100C

P93.X100L

P93.X100K

Units

K-Open loop

  Active axes

X

X

X

 

  Drive control

1 driving channel 1 sensing channel

1 driving channel 1 sensing channel

1 driving channel

 

  Motion and Positioning

  Travel range(0~120V)

95

95

95

µm±10%

  Travel range(0~150V)

118

118

118

µm±10%

  Integrated sensor

CAP

LVDT

-

 

  Resolution

3.5

10

1

nmtyp.

  Closed-loop linearity

0.1

0.15

-

%F.S.

  Repeatability

0.03

0.05

-

%F.S.

  Pitch/Yaw/Roll

<20

<20

<20

µrad

  Mechanical properties

  Push/pull force capacity in motion direction

300/25

300/25

300/25

N

  Stiffness in motion direction

3

3

3

N/µm±20%

  Unloaded resonant frequency

0.2

0.2

0.2

kHz±20%

  Unloaded step time

30

30

7

ms±20%

  Load capacity

20

20

20

Kg

  Drive properties

  Electrical capacitance

15

15

15

μF±20%

  Miscellaneous

  Material

Steel

Steel

Steel

 

  Dimensions(L×W×H)

120×60×60

120×60×60

120×60×60

mm

  Mass

3500

3500

3500

g±5%

  Cable length

1.5

1.5

1.5

m±10mm

  Sensor/voltage connection***

LEMO

LEMO

LEMO

** Custom ultralow temperature and ultrahigh vacuum versions are available. 

***Custom connector is available.  

Note: The parallelism of the moving platform is about 20 μm, and the roughness is about 1.6 to 3.2. Please contact the sales engineer for confirmation before purchase.


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    Drawings(Click on the picture to enlarge it)
     Downloads
Auto CAD PDF
Step
Specs Sheet
Manual

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