- Introduction
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P66.X30 piezo nano-positioning stage uses piezoelectric stacks as driving source and using direct drive mechanism. It is nano-positioning system combining piezoelectric and flexible hinges. Precision, and optional high-precision sensors for closed-loop precise positioning control. This product is ideal for positioning applications such as optical path length correction in interference, sample positioning in microscopy or scanning applications, and more.
Characteristics
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Curve 
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Open/Closed Loop Version
P66 could be selected as open-loop or closed-loop version. Closed-loop is equipped with high-resolution and fast-responding strain sensor (SGS). The device feeds back high-bandwidth, high-precision voltage signals. |
Application Cases: AFM CoreMorrow P66.XY piezo nanopositioning stage is widely used in AFM for its high response frequency, high precision and high reliability. 
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Applications
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| Technical data | ||||
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Models |
S-Closed loop |
P66.X30S |
P66.X30K |
Untis |
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K-Open loop |
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Active axes |
X |
X |
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Drive control |
1 driving channel 1 sensing channel |
1 driving channel |
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Integrated sensor |
SGS |
- |
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Travel range |
0~120 V |
24 |
24 |
µm±10% |
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0~150 V |
30 |
30 |
µm±10% |
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Closed/open loop resolution |
1 |
0.5 |
nm，typ. |
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Closed-loop linearity |
0.1 |
- |
%F.S. |
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Repeatability |
0.05 |
- |
%F.S. |
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Pitch/Yaw/Roll |
<15 |
<15 |
µrad |
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Stiffness in motion direction |
4.4 |
4.4 |
N/µm±20% |
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Unloaded resonant frequency |
5 |
5 |
kHz±20% |
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Closed-loop operating frequency（-3dB） |
600（unloaded） |
600（unloaded） |
Hz±20% |
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Closed/open-loop unloaded Step time |
5 |
0.8 |
ms±20% |
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Push/pull force capacity |
120/15 |
120/15 |
N |
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Load capacity |
Horizontal |
8 |
8 |
kg |
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Vertical |
0.3 | 0.3 | ||
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Inverted |
8 | 8 | ||
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Electrical capacitance |
3.6 |
3.6 |
μF±20% |
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Material |
AL |
AL |
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Mass |
120 |
120 |
g±5% |
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Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime.
Technical data are measured by CoreMorrow E00/E01 series piezo controller.
| Mounting Method |
Horizontal Mounting |
Vertical Mounting |
Inverted Mounting |
| Definition |
Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane.
PS: Default direction for carrying capacity in the parameter table
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Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity
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Place the PZT platform horizontally, but the moving surface is located below the PZT platform |
| Diagram |
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| Note |
When the mounting method is selected as vertical mounting, pay attention to the outlet port |
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Piezo · Nano · Motion
