P66.X30 piezo nano-positioning stage uses piezoelectric stacks as driving source and using direct drive mechanism. It is nano-positioning system combining piezoelectric and flexible hinges. Precision, and optional high-precision sensors for closed-loop precise positioning control. This product is ideal for positioning applications such as optical path length correction in interference, sample positioning in microscopy or scanning applications, and more.
Characteristics
Stroke to 30μm |
Load to 8kg |
Sub-millisecond response time |
Open/closed loop |
Curve |
Open/Closed Loop Version
P66 could be selected as open-loop or closed-loop version. Closed-loop is equipped with high-resolution and fast-responding strain sensor (SGS). The device feeds back high-bandwidth, high-precision voltage signals. |
Application Cases: AFM CoreMorrow P66.XY piezo nanopositioning stage is widely used in AFM for its high response frequency, high precision and high reliability. |
Applications
Interference / scanning |
Metering |
Micromachining / precision control |
CD driving test |
Technical data | ||||
Models |
S-Closed loop |
P66.X30S |
P66.X30K |
Untis |
K-Open loop |
||||
Active axes |
X |
X |
|
|
Drive control |
1 driving channel 1 sensing channel |
1 driving channel |
|
|
Integrated sensor |
SGS |
- |
|
|
Travel range |
0~120 V |
24 |
24 |
µm±10% |
0~150 V |
30 |
30 |
µm±10% |
|
Closed/open loop resolution |
1 |
0.5 |
nm,typ. |
|
Closed-loop linearity |
0.1 |
- |
%F.S. |
|
Repeatability |
0.05 |
- |
%F.S. |
|
Pitch/Yaw/Roll |
<15 |
<15 |
µrad |
|
Stiffness in motion direction |
4.4 |
4.4 |
N/µm±20% |
|
Unloaded resonant frequency |
5 |
5 |
kHz±20% |
|
Closed-loop operating frequency(-3dB) |
600(unloaded) |
600(unloaded) |
Hz±20% |
|
Closed/open-loop unloaded Step time |
5 |
0.8 |
ms±20% |
|
Push/pull force capacity |
120/15 |
120/15 |
N |
|
Load capacity |
8 |
8 |
kg |
|
Electrical capacitance |
3.6 |
3.6 |
μF±20% |
|
Material |
AL |
AL |
|
|
Mass |
120 |
120 |
g±5% |
Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime.
Technical data are measured by CoreMorrow E00/E01 series piezo controller.
|
|