P66.X Piezo Stage, X Direction, Stroke to 30 µmCurrent Location:Product Homepage >> X/Z Piezo Nanopositioner>>P66.X Piezo Stage, X Direction, Stroke to 30 µm
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P66.X30 piezo nano-positioning stage uses piezoelectric stacks as driving source and using direct drive mechanism. It is nano-positioning system combining piezoelectric and flexible hinges. Precision, and optional high-precision sensors for closed-loop precise positioning control. This product is ideal for positioning applications such as optical path length correction in interference, sample positioning in microscopy or scanning applications, and more.


Characteristics


 Stroke to 30μm

 Load to 8kg

 Sub-millisecond response time

 Open/closed loop


Curve

Open/Closed Loop Version

P66 could be selected as open-loop or closed-loop version. Closed-loop is equipped with high-resolution and fast-responding strain sensor (SGS). The device feeds back high-bandwidth, high-precision voltage signals.
The sensor uses full-bridge configuration to eliminate thermal drift, allowing piezo nanopositioning stages to achieve high linearity and repeatability.

Application Cases: AFM

CoreMorrow P66.XY piezo nanopositioning stage is widely used in AFM for its high response frequency, high precision and high reliability.


Applications


 Interference / scanning

 Metering

 Micromachining / precision control

 CD driving test

    Technical data

Models

S-Closed loop

P66.X30S

P66.X30K

Untis

K-Open loop

 Active axes

X

X

 

 Integrated sensor

SGS

-

 

 Travel range

0~120 V

24

24

µm±10%

0~150 V

30

30

µm±10%

 Closed/open loop resolution

1

0.5

nmtyp.

 Closed-loop linearity

0.1

-

%F.S.

 Repeatability

0.05

-

%F.S.

 Pitch/Yaw/Roll

<15

<15

µrad

 Stiffness in motion direction

4.4

4.4

N/µm±20%

 Unloaded resonant frequency

5

5

kHz±20%

Closed-loop operating frequency(-3dB)

250(unloaded)

250(unloaded)

Hz±20%

 Closed/open-loop unloaded Step time

5

0.8

ms±20%

 Push/pull force capacity

120/15

120/15

N

 Load capacity

8

8

kg

 Electrical capacitance

3.6

3.6

μF±20%

 Material

AL

AL

 

 Mass

120

120

g±5%

Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime.

Technical data are measured by CoreMorrow E00/E01 series piezo controller.

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Specs Sheet
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