With the development of semiconductor industry and manufacturing process, wafer quality detection requires higher efficiency and accuracy. To accurately capture defects is very important, especially wafer is a basic component of semiconductor chip manufacturing. Wafer quality detection is highly dependent on ultra-precision instrument measurement, so laser confocal microscopy can be used to achieve wafer quality detection, to help improve the manufacturing process and increase the yield of good products.
The laser confocal microscope uses laser as the light source and adopts the conjugate focusing device. The laser beam is reflected to the objective lens through the illuminated pinhole through the spectroscope, and the piezo objective scanner with the loaded objective lens is precisely positioned and adjusted to focus on the sample, to get every point on the focal plane of the specimen scanned. If there is a fluorescent substance that can be excited in the tissue sample, the fluorescence emitted after excitation is directly reversed back to the spectroscope through the original incident light path, and the focused light is first focused through the piezo objective scanner with a loaded objective when detecting the pinhole. The focused light is detected and collected by the photomultiplier tube (PMT), and the signal is transmitted to the computer, and the image is displayed on the computer monitor after processing. The samples were observed without damage and the 3D spatial structure of the samples was analyzed by computer image processing. In this application, the piezo objective scanner plays the role of two focusing, and the Z-direction nano-level positioning accuracy is adjusted by the loaded objective, so that the focusing accuracy is higher and the image is clearer.
CoreMorrow Piezo Objective Scanner
CoreMorrow piezo objective scanner adopts no return error flexible hinge parallel steering mechanism design, the objective compensation amount is small. With ultra-high focusing stability, the objective scanner is loaded with micro detection/measurement or observation device, which can drive the objective focus to improve the accuracy, the resolution can be up to nanoscale, and can be matched to Zeiss, Nikon, Olympus, Leica and other standard lenses.