XD730.500S/K Piezo Objective ScannerCurrent Location:Product Homepage >> Piezo Objective Scanner>>XD730.500S/K Piezo Objective Scanner
XD730.500S/K Piezo Objective Scanner
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XD730.500 piezo objective scanner features high load capacity, long travel and high accuracy, and is ideal for various optical microscopy applications.


Characteristics


 Motion in Z

 High load capacity

 Long travel

 High accuracy


Application


 Focus microscopy

 Laser processing

 Z Positioning and Scanning

  Surface Structure Analysis

    Technical Data

Type

XD730.400S-B1

XD730.400K-B1

Units

Active axes

Z

Z

 

Drive control

1 driving channel 

1 sensing channel

1 driving channel

 

Travel range(0~120V)

400

400

μm±10%

Travel(0~150V)

500

500

μm±10%

Sensor

SGS

-

 

Open loop resolution

17

5

nm

Linearity

0.12

-

%F.S.

Repeatability

0.03

-

%F.S.

Unloaded resonant frequency

310

310

Hz±20%

Resonant frequency @500g

155

155

Hz±20%

El. capacitance

30

30

μF±10%

Load capacity

0.5

0.5

kg

Material

Al, Steel

Al, Steel


Mass

590

590

g±5%

Note: Above parameters are measured with the E00/E01 piezo controller. The maximum driving voltage can be -20V~150V; For highreliability and long-term operation, the recommended driving voltage is 0~120V.

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    Downloads
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Step
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