The XD730.400S/K Piezo Objective Scanner is a Z axis objective lens drive platform. Its Z-direction stroke can reach 400μm and the load capacity can reach 0.5kg, which is very suitable for static positioning applications.
Characteristics
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Application
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Technical Data | |||
Type |
XD730.400S |
XD730.400K |
Units |
Active axes |
Z |
Z |
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Drive control |
1 driving channel 1 sensing channel |
1 driving channel |
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Travel range(0~120V) |
400 |
400 |
μm±10% |
Max.travel range(0~150V) |
500 |
500 |
μm±10% |
Sensor |
SGS |
- |
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Open loop resolution |
14 |
4 |
nm |
Linearity |
0.2 |
- |
%F.S. |
Repeatability
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0.05 |
- |
%F.S. |
Unloaded resonant frequency |
150 |
150 |
Hz±20% |
El. capacitance |
28.8 |
28.8 |
μF±10% |
Load capacity |
0.5 |
0.5 |
kg |
Mass |
520 |
520 |
g±5% |
Material |
Aluminium, steel |
Aluminium, steel |
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Note: Above parameters are measured with the E00/E01 piezo controller. The maximum driving voltage can be -20V~150V; For highreliability and long-term operation, the recommended driving voltage is 0~120V.
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