P77 series piezoelectric phase shifters are specially designed for optical detection of phase shift applications, with travel range of up to 50µm and load capacity of up to 10kg. P77.D9 is one of the P77 series. It has a central through hole of φ140mm, phase shift stroke of up to 32μm, and resolution of 0.5nm. It is suitable for horizontal laser interferometers for measurement of various optical lenses and lenses. Load capacity up to 5kg.
CoreMorrow piezoelectric phase shifters are mainly customized designs, tailored according to customers' equipment applications.
Features
• Travel range to 0~16/32μm
• Aperture Φ140mm
• Load to 5kg
• Customized
Applications
• Microscopic imaging
• Surface inspection
• Phase shift/interference/metering
• Precision positioning
• Phase shifter
• Optical capture
10V step voltage and displacement curve
Applications
P77.D9 piezoelectric phase shifter is specially designed for horizontal laser interferometer, loaded with large aperture frame, etc., sub-nanometer stepping phase shift, provides high-precision core components for optical inspection equipment, significantly improve optical inspection Accuracy.
Technical data
Active axes: Z
Travel range(0~120V): 12.8/25.6μm
Travel range(0~150V): 16/32μm
Aperture: φ140mm
Size: 210×210×56mm
Resolution: 0.5nm
Pitch/Yaw/Roll: <15μm
Unloaded resonant
Frequency: 200Hz
Load capacity: 5kg
Electrical
Capacitance: 14.4/28.8μF
Material:Aluminum, steel
Mass: 4.2kg
Operating
Temperature: -20~80℃
Control: 1/2
channel
Connector: LEMO
Cable length: 1.5m
P77 Series
P77.Z20
Aperture:Φ106mm
P77.D1
Apertue: Φ106mm
P77.D2
Aperture: Φ36mm
P77.D3
Aperture: Φ160mm
P77.D4
Aperture: Φ160mm
P77.D5
Aperture: Φ210mm
P77.D6
Aperture: Φ65mm
P77.D7
Aperture: Φ65mm
P77.D8
Aperture: Φ260mm