P77.S106 P77.K106 Piezo Phase Shifter,17.5μm, ApertureΦ106mmCurrent Location：Product Homepage >> X/Z Piezo Nanopositioner>>P77.S106 P77.K106 Piezo Phase Shifter,17.5μm, ApertureΦ106mm
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P77 piezo phase shifters are specially designed for optical detection and phase shifting applications, with travel range of up to 50μm and load capacity of up to 15kg, which is very suitable for large-aperture optical inspection equipment, like laser interferometer, for various lenses. Custom versions are available.


Characteristics


 Motion in Z

  Travel to 17.5μm

 Load capacity to 15kg

 Aperture：Ø106mm

 Upright / inverted / side use





Appearance

Moving-part

Direct-driving

Large Aperture&Load Capacity

P77 series piezoelectric scanning stage adopts excellent flexible hinge guiding mechanism design, which is optimized by finite element analysis, the stiffness is up to 8N/μm, and the no-load resonant frequency is 300Hz.
The closed-loop version has built-in high-precision sensors for real-time monitoring and feedback of displacement, enabling nano-scale accuracy of repeatability and linearity.
The 106mm large aperture of stage is very suited for large aperture laser interferometer.

Frequency and Load Curv

Application Case-Interferometer

CoreMorrow P77 piezo phase shifter is widely used in modern interferometers due to its large aperture, nano-scale resolution and high precision, which greatly improves the measurement accuracy of the interferometer.


Applications


 Microscope imaging

  Phaser

 Optical capture

 Precision positioning

 Surface inspection

  Interference



    Technical data

Models

P77.S106
P77.K106

Units

Active axes

Z

 

Travel range(0~120V)

14

μm±10%

Travel range(0~150V)

17.5

μm±10%

Integrated sensor

SGS/-

 

Aperture

Φ106

mm

Resolution

0.5/0.2

nm

Pitch/Yaw/Roll

<10

μrad

Push/pull force

100/20

N

Unloaded resonant frequency

300

Hz±20%

Unloaded Step time

5/2.5

ms±20%

Load capacity

upright15/Lateral5/inverted10

kg

Electrical capacitance

5.4

μF±20%

Material

AL

 

Mass

1600

g±5%

Operating temperature

-20~80

℃

Control

1channel

 

Connector

LEMO

 

Cable length

1.5

m±10mm

Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime. Technical data are measured by CoreMorrow E00/E01 series piezo controller.

Technical data are measured by CoreMorrow E00/E01 series piezo controller.

    Drawings（Click on the picture to enlarge it）
     Downloads
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Step
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Manual
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