P15.XYZ Piezo Scanners, 300µm, Aperture 66×66mmCurrent Location：Product Homepage >> XYZ Piezo Nanopositioner>>P15.XYZ Piezo Scanners, 300µm, Aperture 66×66mm
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P15 is a fast, high-precision scanning and nanopositioning stage with very high straightness. The aperture is 66×66mm, which is ideal for transmitted-light applications such as near field scanning, confocal microscopy and mask positioning. P15 has 300 μm displacement and its internal finite element analysis (FEA) optimized wire-cut flexural hinge structure. FEA gives it the design with the highest possible stiffness and minimizes linear and angular runout


Features


 3 axes

 Stroke to 300μm/axis

 Closed-loop sensor available

 Frictionless, high precision flexible guiding system

 High scanning flatness

 Aperture 66×66mm


Appearance

Moving-part

Amplified-driving

Closed Loop Sensor

P15 is available with closed-loop feedback sensor that provides higher positioning accuracy and is ideal for high-precision positioning applications.

Freqency VS Load Curve

Closed-loop rising curve, full stroke step time 60ms.


Applications


 Scanning microscope

 Mask/wafer positioning

 Interferometry

 Metrology

 Biotechnology

 Micromanipulation

    Technical Data

Type

P15.XY100S-C1

P15.XY100K-C1

P15.XYZ100S-B1

P15.XYZ100K-B1

P15.XYZ100S-B2

P15.XYZ100K-B2

P15.XYZ300S

P15.XYZ300K

P15.XYZ300S-C1

P15.XYZ300K-C1

P15.XYZ300S-C2
P15.XYZ300K-C2

Units

Active axes

X、Y

X、Y、Z

X、Y、Z
 X、Y、Z
 X、Y、Z
 X、Y、Z

Driving channels

2 driving channels
2 sensing channels

3 driving channels
3 sensing channels

4 driving channels
3 sensing channels
 3 driving channels
3 sensing channels
 4 driving channels
3 sensing channels
 4 driving channels
3 sensing channels

Travel(0~120V)

80/axis

100/axis

XY±50
Z100
 240/axis
 ±120/axis
 ±120/axis

μm±10%

Travel(0~150V)

100/axis

120/axis

XY±60
Z120
 300/axis
 ±150/axis
 ±150/axis

μm±10%

Sensor

SGS/-

SGS/-

SGS/-
 SGS/-
 SGS/-
 SGS/-

Aperture 

66×66

60×60

60×60
 66×66
 66×66
 66×66

mm

Resolution

3.5/1

3.5/1

3.5/1
 8/2.5
 8/2.5
 10/5

nm

Linearity

0.15/-

0.2/-

0.2/-
 0.2/-
 0.2/-
 0.2/-

%F.S.

Closed loop 
repeatability

0.1/-

0.1/-

0.1/-
 0.1/-
 0.15/-
 0.15/-

%F.S.

Pitch/yaw/roll

<30

30

30
 <30
 <150
 <100

μrad

Push/pull force

60/10

100/20

XY150/20
Z100/20
 50/10
 200/10
 200/10

N

Stiffness

0.6

0.8

1.6/1.6/0.8 0.1
 1
 1

N/μm±20%

Unloaded resonant 
frequency

200

300/350/400

389/355/400
 140/170/220
 190/145/249
 180/200/200

Hz±20%

Resonant 
frequency at loading

45（@6kg）

-

-
 -
 145/110/145
（@300g）
 49/49/69
（@5kg）

Hz±20%

Closed/open-loop 
unloaded step time 

-

-

-
 60/10
 -
 -

ms±20%

Load capacity

Upright 6/Inverted 
6/Lateral 0.5

1

2
 0.5
 3
 5

kg

El. capacitance

10.8/axis

XY7.2/Z14.4

14.4
 XY10.8/Z13.2
 21.6/axis
 21.6/21.6/43

μF±20%

Material

Aluminum

Steel, Aluminum

Steel, Aluminum
 Aluminum
 Steel, Aluminum
 Steel, Aluminum

Mass(no cable)

<1.1

0.7

0.75
 0.83
 -
 -

kg±5%

Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term and high-reliable operation. Technical data is measured by CoreMorrow E00/E01 series piezo controller.

    P15.XY100S/K-C1 Drawings（Click on the picture to enlarge it）
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    P15.XYZ100 Drawings（Click on the picture to enlarge it）
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    P15.XYZ300 Drawings（Click on the picture to enlarge it）
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    P15.XYZ300S/K-C1 Drawings（Click on the picture to enlarge it）
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    P15.XYZ300S/K-C2 Drawings（Click on the picture to enlarge it）
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     3D diagram presentation
     3D diagram presentation
     三维图演示3D diagram presentation
     3D diagram presentation
    Downloads
Auto CAD PDF

P15.XY100S/K-C1

P15.XYZ100-B1

P15.XYZ100-B2


P15.XYZ300

P15.XYZ300S/K-C1

P15.XYZ300S/K-C2

Step



/
Specs Sheet




Manual
    P15.XYZ300 Motion Video

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