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P15 is a fast, high-precision scanning and nanopositioning stage with very high straightness. The aperture is 66×66mm, which is ideal for transmitted-light applications such as near field scanning, confocal microscopy and mask positioning. P15 has 300 μm displacement and its internal finite element analysis (FEA) optimized wire-cut flexural hinge structure. FEA gives it the design with the highest possible stiffness and minimizes linear and angular runout
Features
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Appearance 
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Moving-part 
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Amplified-driving 
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Closed Loop Sensor P15 is available with closed-loop feedback sensor that provides higher positioning accuracy and is ideal for high-precision positioning applications. |
Freqency VS Load Curve Closed-loop rising curve, full stroke step time 60ms. 
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Applications
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| Technical Data | |||||||||
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Type |
P15.XY100S-C P15.XY100K-C |
P15.XYZ100S P15.XYZ100K |
P15.XYZ100S P15.XYZ100K |
P15.XYZ300S
P15.XYZ300K |
P15.XYZ300S-C
P15.XYZ300K-C |
P15.XYZ300S-A |
Units |
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Active axes |
X、Y |
X、Y、Z |
X、Y、Z |
X、Y、Z |
X、Y、Z |
X、Y、Z |
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Driving channels |
2 driving channels |
3 driving channels |
4 driving channels 3 sensing channels |
3 driving channels 3 sensing channels |
4 driving channels 3 sensing channels |
4 driving channels 3 sensing channels |
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Travel(0~120V) |
80/axis |
100/axis |
XY±50 Z100 |
240/axis |
XY±120/axis Z240 |
XY±120/axis Z240 |
μm±10% |
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Max.travel(0~150V) |
100/axis |
120/axis |
XY±60 Z120 |
300/axis |
XY±150/axis Z300 |
XY±150/axis Z300 |
μm±10% |
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Sensor |
SGS/- |
SGS/- |
SGS/- |
SGS/- |
SGS/- |
SGS/- |
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Aperture |
66×66 |
60×60 |
60×60 |
66×66 |
66×66 |
66×66 |
mm |
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Resolution |
3.5/1 |
3.5/1 |
3.5/1 |
8/2.5 |
8/2.5 |
10/5 |
nm |
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Linearity |
0.15/- |
0.2/- |
0.2/- |
0.2/- |
0.2/- |
0.2/- |
%F.S. |
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Closed loop |
0.1/- |
0.1/- |
0.1/- |
0.1/- |
0.15/- |
0.15/- |
%F.S. |
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Pitch/yaw/roll |
<30 |
30 |
30 |
<30 |
<150 |
<100 |
μrad |
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Push/pull force |
60/10 |
100/20 |
XY150/20 Z100/20 |
50/10 |
200/10 |
200/10 |
N |
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Stiffness |
0.6 |
0.8 |
1.6/1.6/0.8 |
0.1 |
1 |
1 |
N/μm±20% |
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Unloaded resonant |
200 |
300/350/400 |
389/355/400 |
140/170/220 |
190/145/249 |
180/200/200 |
Hz±20% |
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Resonant |
45（@6kg） |
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- |
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145/110/145 （@300g） |
49/49/69 （@5kg） |
Hz±20% |
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Closed/open-loop |
- |
- |
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60/10 |
- |
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ms±20% |
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Load capacity |
Horizontal |
6 |
1 |
2 |
0.5 |
3 |
5 |
kg |
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Vertical |
0.5 | 0.5 | 1 | 0.05 | 0.5 | 1 | |||
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Inverted |
6 | 0.5 | 1 | 0.5 | 0.5 | 1 | |||
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El. capacitance |
10.8/axis |
XY7.2/Z14.4 |
14.4 |
XY10.8/Z13.2 |
21.6/axis |
21.6/21.6/43 |
μF±20% |
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Material |
Aluminum |
Steel, Aluminum |
Steel, Aluminum |
Aluminum |
Steel, Aluminum |
Steel, Aluminum |
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Mass(no cable) |
<1.1 |
0.7 |
0.75 |
0.83 |
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kg±5% |
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Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term and high-reliable operation. Technical data is measured by CoreMorrow E00/E01 series piezo controller.
| Mounting Method |
Horizontal Mounting |
Vertical Mounting |
Inverted Mounting |
| Definition |
Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane.
PS: Default direction for carrying capacity in the parameter table
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Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity
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Place the PZT platform horizontally, but the moving surface is located below the PZT platform |
| Diagram |
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| Note |
When the mounting method is selected as vertical mounting, pay attention to the outlet port |
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Tel：0451-86268790
Piezo · Nano · Motion
