P18.XYZ200 is XYZ axes motion piezo linear scanner. It adopts amplified mechanism and built-in high-reliability piezo actuators, which could realize high-speed scanning up to 200μm. The aperture is Ø35mm, and various displacement strokes and specifications are available for selection. It is suitable for large-travel multi-dimensional scanning applications.
Features
XYZ axis motion |
Stroke to 200μm |
Max load to 0.8kg |
Aperture:Ø35mm |
Quick response time |
Appearance |
Moving-part |
Direct-driving |
Large Stroke, Large Load Capacity
P18.XYZ200 is built with high-reliability PZT, which could achieve the displacement up to 200μm. Closed-loop version could be selected to achieve excellent linearity and repeatability. |
Freqency VS Load Curve |
High Positioning Accuracy |
Applications
Surface inspection |
Scanning microscopy |
Interference/metering |
Image processing and stabilization |
Optical metrology |
Semiconductor measurement |
Technical data | |||
Models |
S-Closed loop K-Open loop |
P18.XYZ200S P18.XYZ200K |
Units |
Active axes |
X、Y、Z |
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Drive control |
3 driving channels |
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Travel range(0~120V) |
160/axis |
μm±10% |
|
Travel range(0~150V) |
200/axis |
μm±10% |
|
Integrated sensor |
SGS/- |
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Aperture |
Ø35 |
mm |
|
Closed/open loop resolution |
7/2 |
nm |
|
Closed-loop linearity |
0.4/- |
%F.S |
|
Repeatability |
0.2/- |
%F.S |
|
Pitch/Yaw/Roll |
<25 |
μrad |
|
Push/pull force capacity |
30/10 |
N |
|
Stiffness |
X0.1/Y0.1/Z0.1 |
N/μm±20% |
|
Unloaded resonant frequency |
X120/Y200/Z300 |
Hz±20% |
|
Closed/open-loop unloaded Step time |
80/10 |
ms±20% |
|
Load capacity |
0.8 |
kg |
|
Electrical capacitance |
11/axis |
μF±20% |
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Material |
Aluminum |
|
|
Mass |
750 |
g±5% |
Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime. Technical data are measured by CoreMorrow E00/E01 series piezo controller.
Technical data are measured by CoreMorrow E00/E01 series piezo controller.
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