- Introduction
- Controllers
- Feedback
S54 series is a two-dimensional θx and θy-axis piezoelectric deflection stage with a large central through-hole. It adopts a frictionless flexible hinge structure design with fast response speed and high closed-loop positioning accuracy. The 80×80mm center large transparent hole makes it easy to be integrated into the systems of microscopy and scanning optics.
Characteristics
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Appearance 
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Moving Part 
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Open-Loop Curve 
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Closed-loop with High Accuracy
The internal flexible hinge guiding mechanism is optimized by finite element analysis to minimize the angular offset and no friction. |
Frequency and Load Curve 
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Custom Available 
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Large Aperture S54 piezoelectric stage has a large aperture of 80×80mm, which is very suitable for applications requiring transmitted light. 
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Measuring Tilt Range 
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Vibration Test 
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Applications
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| Technical data | ||||
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Models |
S - closed loop K - open loop |
S54.T2S |
S54.T2K |
Units |
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Active axis |
θx, θy |
θx, θy |
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Drive control |
3 driving channels 2 sensing channels |
3 driving channels |
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Tilt angle(0~120V) |
±0.8/axis(≈±165″) |
±0.8/axis(≈±165″) |
mrad±10% |
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Tilt angle(0~150V) |
±1/axis(≈±200″) |
±1/axis(≈±200″) |
mrad±10% |
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Sensor type |
SGS |
- |
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Tilt resolution |
0.25（≈0.05"） |
0.05（≈0.01"） |
μrad |
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Closed-loop linearity |
0.2 |
- |
%F.S. |
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Closed-loop repeatability |
0.1 |
- |
%F.S. |
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Push/pull force |
40/8 |
40/8 |
N |
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Stiffness in motion direction |
0.5 |
0.5 |
N/μm±20% |
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Unloaded resonant frequency |
θx450/θy400 |
θx450/θy400 |
Hz±20% |
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Unloaded step time |
20 |
3.5 |
ms±20% |
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Closed-loop operating frequency（-3dB） |
110（unloaded） |
110（unloaded） |
Hz±20% |
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Load capacity |
1 |
1 |
kg |
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El.capacitance |
3.6/axis |
3.6/axis |
μF±20% |
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Material |
Aluminum, steel |
Aluminum, steel |
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Mass |
510 |
510 |
g±5% |
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Note: Above parameters are measured with the E00/E01 series piezo controller. The maximum driving voltage can be -20V~150V; for high reliability long-term use, the recommended driving voltage is 0~120V.
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Tel：0451-86268790
Piezo · Nano · Motion
