- Introduction
- Controllers
- Feedback
S51 series is a piezoelectric deflection stage with three-dimensional θx, θy and Z-axis movement, and with a 80×80mm central large aperture. It adopts frictionless flexible hinge structure design, featuring fast response speed and high precision of closed loop positioning. The central large aperture makes it easy to integrate into microscopic and scanning in optical system.
Characteristics
|
|
|
|
|
|
Appearance 
|
Moving Part 
|
Low-Profile Design S51 piezo stage are specially designed for alignment, nanofocusing, metrology, etc, and features low-profile of only 20mm, easy to integrate into high precision microscopes. |
|
High Guiding Accuracy Resolution
S51 adopts frictionless flexible hinge guiding structure and is optimized by finite element analysis, with high stiffness and guiding precision. |
Frequency and Load Curve 
|
Simulation Analysis Finite element analysis techniques are used to design the highest stiffness in the direction of motion and to reduce angular misalignment. The hinged section allows for extremely high precision movements because the hinge mechanism has no gaps and no friction. 
|
|
Tilt Angle Range Measuring 
|
Load Step Time(Loading 240g) 
|
Load Step Time(Loading 500g)
|
Applications
|
|
|
|
|
|
|
|
|
|
| Technical data | ||||
|
Models |
S - closed loop K - open loop |
S51.ZT1S |
S51.ZT1K |
Units |
|
Active axis |
θx, θy, Z |
θx, θy, Z |
|
|
|
Drive control |
3 driving channels 3 sensing channels |
3 driving channels |
|
|
|
Linear travel range (0~+120V) |
80 |
80 |
μm±20% |
|
|
Linear travel range (0~+150V) |
100 |
100 |
μm±20% |
|
|
Tilt angle (0~+120V) |
±0.9/axis（≈±190"） |
±0.9/axis（≈±190"） |
mrad±20% |
|
|
Tilt angle (0~+150V) |
±1.1/axis（≈±220"） |
±1.1/axis（≈±220"） |
mrad±20% |
|
|
Sensor type |
SGS |
- |
|
|
|
Resolution in Z |
7 |
4 |
nm |
|
|
Tilt resolution, θx, θy |
0.25（≈0.05"） |
0.05（≈0.01"） |
μrad |
|
|
Closed-loop linearity |
0.1 |
- |
%F.S. |
|
|
Closed-loop repeatability |
0.05 |
- |
%F.S. |
|
|
Push/pull force |
120/15 |
120/15 |
N |
|
|
Stiffness in motion direction（Z） |
1.5 |
1.5 |
N/μm±20% |
|
|
Unloaded resonant frequency |
340 |
340 |
Hz±20% |
|
|
Unloaded step time |
30 |
4.5 |
ms±20% |
|
|
Load capacity |
1(optional 2.5kg version) |
1(optional 2.5kg version) |
kg |
|
|
El.capacitance |
3.6/axis |
3.6/axis |
μF±20% |
|
|
Material |
Aluminum, steel |
Aluminum, steel |
|
|
|
Mass |
820 |
820 |
g±5% |
|
Note: Above parameters are measured with the E00/E01 series piezo controller. The maximum driving voltage can be -20V~150V; for high reliability long-term use, the recommended driving voltage is 0~120V.
Sweep, get the latest information on core tomorrow
Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
