- Introduction
- Controllers
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piezoelectric Tilt/Tip and Z Platform(phase shifter) is a θx, θy deflection/tilt and Z-axis linear motion platform, with a center aperture. The product is compact, and features the deflection range of 1.5mrad, Z-axis linear motion travel of 10μm. The piezo tilt tip and Z platform is an open-loop version with high resolution and response speed, it is the first choice for interference scanning phase shift.
Characteristics
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Appearance 
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θx θy Z motion 
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Motion Control The platform has three piezo actuators connected in parallel to provide the top ring motion. For vertical positioning (piston movement), it requires a controller with only one drive channel and three drive channels are required to provide Z-direction and tip/tilt motion. |
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Frequency and Load Curves 
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Optional Lens Adapter 
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Open Loop, High Dynamic, With Aperture The platform is multi-axis motion platform with volume of Ø20 × 19.5mm, can achieve θx, θy axis of 0.7mrad deflection and 10μm linear travel in Z. The open-loop version features ultra-high resolution and ultra-fast response speed. The tripod structure design has an very wide operating temperature range. The center of the platform has a through hole of Ø10mm diameter, which is suitable for applications requiring light transmission, such as light filtration. |
Applications
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| Technical data | ||||
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Models |
Suffix K - open loop |
S23.Z10K |
S23.ZT1K |
Units |
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Active axis |
Z |
θx θy Z |
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Drive control |
1 driving channel |
3 driving channel |
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θx, θy tilt angle（0~120V） |
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1.2(≈248″) |
mrad±20% |
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Travel in Z（0~120V） |
8 |
8 |
μm±20% |
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θx, θy Max.tilt angle（0~150V） |
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1.5(≈309″) |
mrad±20% |
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Max.travel in Z（0~150V） |
10 |
10 |
μm±20% |
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Tilt resolution in θx, θy |
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0.02（＜0.01"） |
μrad |
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Resolution in Z |
0.08 |
0.08 |
nm |
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Unloaded resonant frequency |
7.5 |
θx3.2/θy3.5/Z7.5 |
kHz±20% |
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Unloaded step time |
1.5 |
0.5 |
ms±20% |
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El.capacitance |
0.5 |
0.5/axis |
μF±20% |
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Material |
Steel |
Steel |
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Mass |
50 |
80 |
g±5% |
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Note: Above parameters are measured with the E00/E01 series piezo controller. The maximum driving voltage can be -20V~150V; for high reliability long-term use, the recommended driving voltage is 0~120V.
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Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
