- Introduction
- Controllers
- Feedback
P66.XYZ piezo nano-positioning stage uses piezoelectric stacks as driving source and using direct drive mechanism. It is nano-positioning system combining piezoelectric and flexible hinges. Precision, and optional high-precision sensors for closed-loop precise positioning control. This product is ideal for positioning applications such as optical path length correction in interference, sample positioning in microscopy or scanning applications, and more.
Characteristics
|
|
|
|
|
|
Appearance 
|
Moving-part 
|
Direct-driving 
|
|
Open/Closed Loop Version
P66 could be selected as open-loop or closed-loop version. Closed-loop is equipped with high-resolution and fast-responding strain sensor (SGS). The device feeds back high-bandwidth, high-precision voltage signals. |
Sensor 
|
Application Cases: AFM CoreMorrow P66.XY piezo nanopositioning stage is widely used in AFM for its high response frequency, high precision and high reliability. 
|
|
Freqency VS Load Curve 
|
Applications
|
|
|
|
|
| Technical data | |||
|
Models |
S-Closed loop K-Open loop |
P66.XYZ30S P66.XYZ30K |
Untis |
|
Active axes |
XYZ |
|
|
|
Drive control |
3 driving channels 3 sensing channels |
|
|
|
Travel range（0~120V） |
24/axis |
μm±10% |
|
|
Max.travel range（0~150V） |
30/axis |
μm±10% |
|
|
Integrated sensor |
SGS/- |
|
|
|
Closed/open loop resolution |
1/0.5 |
nm |
|
|
Closed-loop linearity |
0.15/- |
%F.S. |
|
|
Repeatability |
0.1/- |
%F.S. |
|
|
Pitch/Yaw/Roll |
<15 |
µrad |
|
|
Push/pull force capacity |
30/10 |
N |
|
|
Stiffness in motion direction |
1.1 |
N/μm±20% |
|
|
Unloaded resonant frequency |
X0.6/Y0.7/Z1.2 |
kHz±20% |
|
|
Closed/open-loop unloaded Step time |
30/1 |
ms±20% |
|
|
Closed-loop operating frequency（-3dB） |
100（unloaded） |
Hz±20% |
|
|
Load capacity |
Horizontal |
1 |
kg |
|
Vertical |
0.05 | ||
|
Inverted |
0.1 | ||
|
Electrical capacitance |
3.6/axis |
μF±20% |
|
|
Material |
Aluminum |
|
|
|
Mass |
460 |
g±5% |
|
Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime.
Technical data are measured by CoreMorrow E00/E01 series piezo controller.
| Mounting Method |
Horizontal Mounting |
Vertical Mounting |
Inverted Mounting |
| Definition |
Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane.
PS: Default direction for carrying capacity in the parameter table
|
Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity
|
Place the PZT platform horizontally, but the moving surface is located below the PZT platform |
| Diagram |
 |
 |
 |
| Note |
When the mounting method is selected as vertical mounting, pay attention to the outlet port |
||
Sweep, get the latest information on core tomorrow
Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
