P66.XYZ Piezo Stage, XYZDirection, Stroke to 30 µmCurrent Location：Product Homepage >> XYZ Piezo Nanopositioner>>P66.XYZ Piezo Stage, XYZDirection, Stroke to 30 µm
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P66.XYZ piezo nano-positioning stage uses piezoelectric stacks as driving source and using direct drive mechanism. It is nano-positioning system combining piezoelectric and flexible hinges. Precision, and optional high-precision sensors for closed-loop precise positioning control. This product is ideal for positioning applications such as optical path length correction in interference, sample positioning in microscopy or scanning applications, and more.


Characteristics


 Stroke to 30μm

 Load to 1kg

 Sub-millisecond response time

 Open/closed loop


Appearance

Moving-part

Direct-driving

Open/Closed Loop Version

P66 could be selected as open-loop or closed-loop version. Closed-loop is equipped with high-resolution and fast-responding strain sensor (SGS). The device feeds back high-bandwidth, high-precision voltage signals.
The sensor uses full-bridge configuration to eliminate thermal drift, allowing piezo nanopositioning stages to achieve high linearity and repeatability.

Sensor

Application Cases: AFM

CoreMorrow P66.XY piezo nanopositioning stage is widely used in AFM for its high response frequency, high precision and high reliability.

Freqency VS Load Curve


Applications


 Interference / scanning

 Metering

 Micromachining / precision control

 CD driving test

    Technical data

Models

S-Closed loop

K-Open loop

P66.XYZ30S

P66.XYZ30K

Untis

Active axes

XYZ

 

Drive control

3 driving channels 3 sensing channels

 

Travel range（0~120V）

24/axis

μm±10%

Travel range（0~150V）

30/axis

μm±10%

Integrated sensor

SGS/-

 

Closed/open loop resolution

1/0.5

nm

Closed-loop linearity

0.15/-

%F.S.

Repeatability

0.1/-

%F.S.

Pitch/Yaw/Roll

<15

µrad

Push/pull force capacity

30/10

N

Stiffness in motion direction

1.1

N/μm±20%

Unloaded resonant frequency

X0.6/Y0.7/Z1.2

kHz±20%

Closed/open-loop unloaded Step time

30/1

ms±20%

Closed-loop operating frequency（-3dB）

100（unloaded）

Hz±20%

Load capacity

1

kg

Electrical capacitance

3.6/axis

μF±20%

Material

Aluminum

 

Mass

460

g±5%

Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime.

Technical data are measured by CoreMorrow E00/E01 series piezo controller.

    Drawings（Click on the picture to enlarge it）
     Downloads
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Step

Specs Sheet
Manual
     3D diagram presentation

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