P66.XY30 Piezo Stage, XYDirection, Stroke to 30 µmCurrent Location:Product Homepage >> XY/XZ Nanopositioner>> P66.XY30 Piezo Stage, XYDirection, Stroke to 30 µm
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P66.XY30 piezo nano-positioning stage uses piezoelectric stacks as driving source and using direct drive mechanism. It is nano-positioning system combining piezoelectric and flexible hinges. Precision, and optional high-precision sensors for closed-loop precise positioning control. This product is ideal for positioning applications such as optical path length correction in interference, sample positioning in microscopy or scanning applications, and more.


Characteristics


 Stroke to 30μm

 Open/closed loop

 Load to 5kg

 Sub-millisecond response time


Appearance

Moving Part

Direct-driving

Open/Closed Loop Version

P66 could be selected as open-loop or closed-loop version. Closed-loop is equipped with high-resolution and fast-responding strain sensor (SGS). The device feeds back high-bandwidth, high-precision voltage signals. The sensor uses full-bridge configuration to eliminate thermal drift, allowing piezo nanopositioning stages to achieve high linearity and repeatability.

Sensor

Freqency VS Load Curve

Application Cases: AFM

CoreMorrow P66.XY piezo nanopositioning stage is widely used in AFM for its high response frequency, high precision and high reliability.


Applications


 Interference / scanning

 Metering

 Micromachining / precision control

 CD driving test

    Technical data

Models

S-Closed loop

K-Open loop

P66.XY30S

P66.XY30K

Untis

Active axes

XY

 

Travel range0~120V

24/axis

μm±10%

Travel range0~150V

30/axis

μm±10%

Integrated sensor

SGS/-

 

Closed/open loop resolution

1/0.5

nm

Closed-loop linearity

0.1/-

%F.S.

Repeatability

0.08/-

%F.S.

Pitch/Yaw/Roll

<15

µrad

Push/pull force capacity

100/15

N

Stiffness in motion direction

3.3

N/μm±20%

Unloaded resonant frequency

X1.6/Y0.9

kHz±20%

Closed/open-loop unloaded Step time

8/0.8

ms±20%

Closed-loop operating frequency(-3dB)

-

Hz±20%

Load capacity

5

kg

Electrical capacitance

3.6/axis

μF±20%

Material

Aluminum

 

Mass

260

g±5%

Note: Above parameters are measured with the E00/E01 series piezo controller. The maximum driving voltage can be -20V~150V; for high reliability long-term use, the recommended driving voltage is 0~120V.

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Step

Specs Sheet
Manual
     3D diagram presentation

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Piezo · Nano · Motion

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