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P66.X60 piezo nano-positioning stage uses piezoelectric stacks as driving source and using direct drive mechanism. It is nano-positioning system combining piezoelectric and flexible hinges. Precision, and optional high-precision sensors for closed-loop precise positioning control. This product is ideal for positioning applications such as optical path length correction in interference, sample positioning in microscopy or scanning applications, and more.
Features
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Open/Closed Loop Version
P66 could be selected as open-loop or closed-loop version. Closed-loop is equipped with high-resolution and fast-responding strain sensor (SGS). The device feeds back high-bandwidth, high-precision voltage signals. |
Application Cases: AFM CoreMorrow P66.XY piezo nanopositioning stage is widely used in AFM for its high response frequency, high precision and high reliability. 
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Applications
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| Technical data | |||
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Models |
S-Closed loop K-Open loop |
P66.X60S P66.X60K |
Untis |
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Active axes |
X |
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Drive control |
1 driving channel 1 sensing channel |
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Travel range（0~120V） |
48 |
μm±10% |
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Travel range（0~150V） |
60 |
μm±10% |
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Integrated sensor |
SGS/- |
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Closed/open loop resolution |
2/0.5 |
nm |
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Closed-loop linearity |
0.1/- |
%F.S. |
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Repeatability |
0.05/- |
%F.S. |
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Pitch/Yaw/Roll |
<20 |
µrad |
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Push/pull force capacity |
160/16 |
N |
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Stiffness in motion direction |
2.8 |
N/μm±20% |
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Unloaded resonant frequency |
2.8 |
kHz±20% |
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Closed/open-loop unloaded Step time |
10/1.6 |
ms±20% |
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Closed-loop operating frequency（-3dB） |
500（unloaded） |
Hz±20% |
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Load capacity |
6 |
kg |
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Electrical capacitance |
7.2 |
μF±20% |
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Material |
Aluminum |
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Mass |
190 |
g±5% |
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Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
