The amplified piezo actuator is an actuator that amplifies and vertically outputs the displacement generated by the preloaded low-voltage piezo stacks by a mechanical amplifying structure.
The amplified structure is an elliptical mechanical shell, and its material is generally steel. In addition to providing optimized pre-tightening force for the piezo stacks, it also protects the piezo stacks from tensile forces and tensile forces. It can cause irreversible or even fatal damage to piezo stacks. The elliptical mechanical magnification structure also provides the user with an easy to integrate mechanical interface.
Characteristics
|
 30μm to 1.6mm travel
|
Blocking force to 1000N
|
Unloaded resonant frequency to 3900Hz
|
Nanoscale resolution
|
|
Principle
|
40A5（32μm travel）
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60A5（48μm travel）
|
|
95A10（95μm travel,540N force）
|
Closed-loop 130A5（130μm travel）
|
700A7（600μm travel）
|
|
800A7（700μm travel）
|
Applications
Optometry：
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Probe scanning
|
optical lens positioning
|
optical switch
|
micro-scanning
|
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wafer testing
|
astronomy
|
focus positioning
|
laser cavity tuning
|
|
fiber coupling and deformation
|
modulator
|
chopper, interferometer
|
PDP Crystal cutting
|
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FBG (fiber Bragg grating) deformation
|
|
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Mechanics:
|
Fiber stretching
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tool positioning
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pick and place tools
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diamond turning
|
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elliptical piston machining
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damping, dynamic control
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device fatigue monitoring
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NDT
|
|
new generation ultrasonic or sonic vibration
|
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Fluidics:
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Proportional valves
|
inkjet technology
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syringes
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droplet generators
|
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flow measurement technology
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|
|
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技术参数
|
|
Type
|
Active axes
|
Stroke
[μm]±20%
|
Unloaded resonant
frequency[Hz]±20%
|
Blocking force
[N]
|
Stiffness
[N/μm]±20%
|
El. capacitance
[μF]±20%
|
Mass
[g]±5%
|
Material
|
Sensor
|
Specs Sheet Download
|
Diagram
|
Step
|
|
30A2*
|
X
|
30
|
3150
|
6
|
0.2
|
0.075
|
-
|
steel
|
optional
|
|
/
|
|
|
35A2
|
X
|
35
|
1900
|
9
|
0.26
|
0.17
|
-
|
steel
|
optional
|
|
|
/
|
|
40A5
|
X
|
40
|
3900
|
7.6
|
0.19
|
0.8
|
14
|
steel
|
optional
|
|
|
|
|
50A2*
|
X
|
50
|
2000
|
7
|
0.14
|
0.125
|
-
|
steel
|
optional
|
|
|
/
|
|
60A5
|
X
|
60
|
2500
|
43.2
|
0.72
|
1.8
|
29
|
steel
|
optional
|
|
|
|
|
70A5
|
X
|
70
|
900
|
49
|
0.7
|
1.8
|
-
|
steel
|
optional
|
|
|
/
|
|
80A5
|
X
|
80
|
700
|
32
|
0.4
|
1.8
|
-
|
steel
|
optional
|
|
|
/
|
|
80A14
|
X
|
105
|
1700
|
1000
|
13
|
44
|
-
|
steel
|
optional
|
|
|
/
|
|
95A10
|
X
|
95
|
350
|
540
|
5.7
|
21.6
|
253
|
steel
|
optional
|
|
/
|
/
|
|
100A5
|
X
|
100
|
1850
|
67.0
|
0.67
|
3.6
|
-
|
steel
|
optional
|
|
|
/
|
|
100A7
|
X
|
100
|
1950
|
155.0
|
1.55
|
7.2
|
-
|
steel
|
optional
|
|
|
|
|
115A10
|
X
|
115
|
1050
|
253
|
2.2
|
21.6
|
-
|
steel
|
optional
|
|
|
/
|
|
120A14
|
X
|
120
|
400
|
54
|
0.45
|
29
|
-
|
steel
|
optional
|
|
|
/
|
|
125A5
|
X
|
125
|
1150
|
25
|
0.2
|
3.6
|
-
|
steel
|
optional
|
|
|
/
|
|
130A5
|
X
|
130
|
900
|
7.8
|
0.06
|
1.8
|
44
|
steel
|
optional
|
|
|
/
|
|
150A5
|
X
|
150
|
1250
|
39
|
0.26
|
3.6
|
22
|
steel
|
optional
|
|
|
/
|
|
180A5
|
X
|
180
|
750
|
18
|
0.1
|
3.6
|
-
|
steel
|
optional
|
|
|
/
|
|
200A5
|
X
|
200
|
850
|
20
|
0.1
|
3.6
|
-
|
steel
|
optional
|
|
|
/
|
|
200A10
|
X
|
200
|
600
|
60
|
0.3
|
21.6
|
-
|
steel
|
optional
|
|
|
|
|
230A10
|
X
|
230
|
200
|
59.8
|
0.26
|
43
|
-
|
steel
|
optional
|
|
|
/
|
|
240A5
|
X
|
240
|
600
|
12
|
0.05
|
3.6
|
-
|
steel
|
optional
|
|
|
/
|
|
300A10
|
X
|
300
|
450
|
69
|
0.23
|
21.6
|
-
|
steel
|
optional
|
|
|
/
|
|
400A5
|
X
|
400
|
470
|
16
|
0.04
|
3.6
|
-
|
steel
|
optional
|
|
|
|
|
400A7
|
X
|
400
|
300
|
16
|
0.04
|
10.8
|
103
|
steel
|
optional
|
|
|
/
|
|
500A10
|
X
|
500
|
390
|
22.5
|
0.045
|
43
|
-
|
steel
|
optional
|
|
|
/
|
|
550A14
|
X
|
550
|
210
|
126.5
|
0.23
|
130
|
-
|
steel
|
optional
|
|
|
|
|
700A7
|
X
|
600
|
530
|
3.6
|
0.006
|
10.8
|
59
|
steel
|
optional
|
|
|
/
|
|
900A10
|
X
|
720
|
280
|
36
|
0.05
|
43
|
-
|
steel
|
optional
|
|
|
/
|
|
1000A14
|
X
|
800
|
220
|
112
|
0.14
|
130
|
-
|
steel
|
optional
|
|
|
/
|
|
1500A10
|
X
|
1200
|
160
|
12
|
0.01
|
43
|
-
|
steel
|
optional
|
|
|
/
|
|
2000A10
|
X
|
1600
|
190
|
11.2
|
0.007
|
43
|
-
|
steel
|
optional
|
|
|
/
|
Note: above travel is at 0~150V; Recommended 0~120V for long-term and high-reliable operation.
The driving source of 30A2/50A2 is Piezo Stack
30A2 Drawings（Click on the picture to enlarge it） 
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35A2 Drawings（Click on the picture to enlarge it）
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40A5 Drawings（Click on the picture to enlarge it）
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50A2 Drawings（Click on the picture to enlarge it）
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60A5 Drawings（Click on the picture to enlarge it）
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70A5 Drawings（Click on the picture to enlarge it）
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80A5 Drawings（Click on the picture to enlarge it）
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80A14 Drawings（Click on the picture to enlarge it）
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95A10 Drawings（Click on the picture to enlarge it）
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100A5 Drawings（Click on the picture to enlarge it）
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100A7 Drawings（Click on the picture to enlarge it）
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115A10 Drawings（Click on the picture to enlarge it）
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120A14 Drawings（Click on the picture to enlarge it）
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125A5 Drawings（Click on the picture to enlarge it）
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130A5 Drawings（Click on the picture to enlarge it）
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150A5 Drawings（Click on the picture to enlarge it）
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180A5 Drawings（Click on the picture to enlarge it）
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200A5 Drawings（Click on the picture to enlarge it）
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200A10 Drawings（Click on the picture to enlarge it）
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230A10 Drawings（Click on the picture to enlarge it）
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240A5 Drawings（Click on the picture to enlarge it）
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300A10 Drawings（Click on the picture to enlarge it）
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400A5 Drawings（Click on the picture to enlarge it）
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400A7 Drawings（Click on the picture to enlarge it）
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550A14 Drawings（Click on the picture to enlarge it）
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500A10 Drawings（Click on the picture to enlarge it）
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700A7 Drawings（Click on the picture to enlarge it）
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900A10 Drawings（Click on the picture to enlarge it）
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1000A14 Drawings（Click on the picture to enlarge it）
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1500A10 Drawings（Click on the picture to enlarge it）
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2000A10 Drawings（Click on the picture to enlarge it）
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Downloads
|
Manual
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