- Introduction
- Controllers
- Feedback
P12.XYZ100 is XY-axes scanning stage. The aperture diameter could be selected as 25mm(35mm is optional), which is suitable for applications such as microscopy. The piezo scanner could realize single-axis displacement of 100μm. Integrated structure makes multi-dimensional motion uncoupled and could be selected in various specifications to meet the needs of different applications.
Characteristics
|
|
|
|
|
|
Appearance 
|
P12.X-D3 moving part 
|
Amplified-driving 
|
|
1~3 - Axis Scanning Stage P12 piezo nanopositioning stage is a 1~3-axis linear piezo scanning stage, including X, Z, XY, XZ, XYZ motion versions. A variety of specifications and models for choice with optional aperture diameter of 25mm or 35mm. |
Freqency VS Load Curve 
|
Application case-Inverted Piezo Scanner 
|
|
Custom Version 
|
Custom Version 
|
Applications
|
|
|
|
|
|
|
|
|
|
| Technical data | ||||
|
Models |
S-Closed loop K-Open loop |
P12.XYZ100S-D P12.XYZ100K-D |
Units |
|
|
Active axes |
XYZ |
|
||
|
Drive control |
3 driving channels 3 sensing channels |
|
||
|
Travel range(0~120V) |
80/axis |
μm±10% |
||
|
Max.travel range(0~150V) |
100/axis |
μm±10% |
||
|
Integrated sensor |
SGS/- |
|
||
|
Aperture |
Ø25/Ø35 |
mm |
||
|
Closed/open loop resolution |
3/1 |
nm |
||
|
Closed-loop linearity |
0.1/- |
%F.S |
||
|
Repeatability |
0.05/- |
%F.S |
||
|
Pitch/Yaw/Roll |
<15 |
μrad |
||
|
Push/pull force capacity |
20/4 |
N |
||
|
Stiffness |
X0.3/Y0.25/Z0.2 |
N/μm±20% |
||
|
Unloaded resonant frequency |
X230/Y180/Z150 |
Hz±20% |
||
|
Closed/open-loop unloaded Step time |
30/0.8 |
ms±20% |
||
|
Closed-loop operating frequency（-3dB） |
- |
Hz±20% |
||
|
Load capacity |
Horizontal |
0.6 |
kg |
|
|
Vertical |
0.03 | |||
|
Inverted |
0.03 | |||
|
Electrical capacitance |
1.8/axis |
μF±20% |
||
|
Material |
Steel, Aluminum |
|
||
|
Mass |
260 |
g±5% |
||
Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime.
Technical data are measured by CoreMorrow E00/E01 series piezo controller.
| Mounting Method |
Horizontal Mounting |
Vertical Mounting |
Inverted Mounting |
| Definition |
Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane.
PS: Default direction for carrying capacity in the parameter table
|
Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity
|
Place the PZT platform horizontally, but the moving surface is located below the PZT platform |
| Diagram |
 |
 |
 |
| Note |
When the mounting method is selected as vertical mounting, pay attention to the outlet port |
||
Sweep, get the latest information on core tomorrow
Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
