P16.XY20 Piezo Scanner, ApertureØ26mmCurrent Location:Product Homepage >> XY Piezo Nanopositioner>>P16.XY20 Piezo Scanner, ApertureØ26mm
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P16.XY20 piezo scanner is an XY motion scanning platform, adopting amplification mechanism. It features a center aperture diameter of 26mm and ±8μm displacement in X and Y axes. The product is very compact and easy to integrate.


Features


 Travel to ±8μm

 Load capacity to 1kg

 Aperture:Ø26mm

 Closed loop for high accuracy

 Available UHV

 Custom is available 


Moving-part

Amplified-driving

High Dynamics, Resolution

P16.XY20 is small-volume high-precision translation scanning stage. It moves in X and Y-axis, specially designed for high-resolution, high-dynamic, high-positioning precision applications. It has built-in high-reliability piezoelectric ceramics and can realize XY axis ±8μm displacement, the resolution can reach 0.5nm, and the full-stroke repeatability accuracy is up to nanometer.

Open/Closed Loop Curve

Freqency VS Load Curve

Applications case-Infrared Camera

P16.XY20 piezo scanning stage is applied to infrared camera with its high frequency and high resolution, which greatly improves the resolution of the imaging.


Applications


 Microscopic imaging

 Surface inspection

 Image stabilization

 Interference/metering

 Precision positioning

 XY scanning

    Technical data

Models

Suffix S-Closed loop
Suffix K-Open loop

P16.XY20S

P16.XY20K

Units

Active axis

XY

 XY

  Driving channels

3 driving channels
2 sensing channels

3 driving channels
2 sensing channels

 

Travel range(0~100V)

±6.6/axis

±6.6/axis

μm±10%

Travel range(0~120V)

±8/axis

±8/axis

μm±10%

Sensor type

SGS

 -


Aperture size

Ø26

Ø26

mm

Resolution

0.5

0.2

nm

Linearity

0.3

-

%F.S

Repeatability

0.1

-

%F.S

Pitch/yaw/roll

<10

<10

μrad

Push/pull force

44/44

44/44

N

Stiffness in motion direction

X2.2/Y2.2

X2.2/Y2.2

N/μm±20%

Unloaded resonant frequency

X2000/Y2000

X2000/Y2000

Hz±20%

Unloaded step time

1.5

0.7

ms±20%

El.capacitance

1.6/axis

1.6/axis

μF±20%

Material

Steel, Al

 Steel, Al


Mass

18

180

g±5%

Note: Above parameters are measured with the E00/E01 series piezo controller. The maximum driving voltage can be -20V~150V; for high reliability long-term use, the recommended driving voltage is 0~120V.

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