P12.XZ Piezo Scanners, 100µm, With Ø25 or Ø35 apertureCurrent Location:Product Homepage >> XY Piezo Nanopositioner>>P12.XZ Piezo Scanners, 100µm, With Ø25 or Ø35 aperture
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P12.XZ100 is XZ-axes scanning stage. The aperture diameter could be selected as 25mm(35mm is optional), which is suitable for applications such as microscopy. The piezo scanner could realize single-axis displacement of 100μm. Integrated structure makes multi-dimensional motion uncoupled and could be selected in various specifications to meet the needs of different applications.


Features


 XZ axes

 Max stroke to 100μm

 Max load to 0.7kg

 With Ø25 or Ø35 aperture


Appearance

P12.XZ moving part

Amplified-driving

1~3 - Axis Scanning Stage

P12 piezo nanopositioning stage is a 1~3-axis linear piezo scanning stage, including X, Z, XY, XZ, XYZ motion versions. A variety of specifications and models for choice with optional aperture diameter of 25mm or 35mm.

Freqency VS Load Curve

Application case-Inverted Piezo Scanner


Applications


 Scanning interference

 Confocal microscopy

 Wafer positioning

 Surface measurement

 Image processing and stabilization

 Optical capture



    Technical data

Models

S-Closed loop

P12.XZ100S

P12.XZ100K

Units

K-Open loop

  Active axes

XZ

XZ

 

  Drive control

2 driving channels 2 sensing channels

2 driving channels

 

  Motion and Positioning

  Travel range0~120V

80

80

µm/±10%

  Travel range0~150V

100

100

µm/±10%

  Integrated sensor

SGS

-

 

  Aperture

Ø25/Ø35

Ø25/Ø35

mm

  Resolution

3

1

nmtyp.

  Closed-loop linearity

0.12

-

%F.S.

  Repeatability

0.08

-

%F.S.

  Pitch/Yaw/Roll

<10

<10

µrad

  Mechanical properties

  Push/pull force capacity in motion direction

25/8

25/8

N

  Stiffness in motion direction

0.25

0.25

N/µm±20%

  Unloaded resonant frequency

200

200

Hz±20%

  Unloaded step time

30

0.8

ms±20%

Closed-loop operating frequency(-3dB)

-

-

Hz±20%

   Load capacity

0.6

0.6

Kg

  Electrical capacitance

1.8

1.8

μF/axis±20%

  Material

Steel, Aluminum

Steel, Aluminum

 

  Mass

200

200

g±5%

Note: Max driving voltage could be -20V~150V, recommended voltage 0~120V for long-term, high-reliability operation. Technical data is measured by CoreMorrow E00/E01 series piezo controller.

    Drawings(Click on the picture to enlarge it)
    Drawings(Click on the picture to enlarge it)
     3D diagram presentation
     3D diagram presentation
    Downloads
Auto CAD PDF
Step

Specs Sheet

P12.XZ100 φ25

P12.XZ100 φ35

Manual


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