P12.XZ100 is XZ-axes scanning stage. The aperture diameter could be selected as 25mm(35mm is optional), which is suitable for applications such as microscopy. The piezo scanner could realize single-axis displacement of 100μm. Integrated structure makes multi-dimensional motion uncoupled and could be selected in various specifications to meet the needs of different applications.
Features
XZ axes |
Max stroke to 100μm |
Max load to 0.7kg |
With Ø25 or Ø35 aperture |
Appearance |
P12.XZ moving part |
Amplified-driving |
1~3 - Axis Scanning Stage P12 piezo nanopositioning stage is a 1~3-axis linear piezo scanning stage, including X, Z, XY, XZ, XYZ motion versions. A variety of specifications and models for choice with optional aperture diameter of 25mm or 35mm. |
Freqency VS Load Curve |
Application case-Inverted Piezo Scanner |
Applications
Scanning interference |
Confocal microscopy |
Wafer positioning |
Surface measurement |
Image processing and stabilization |
Optical capture |
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Technical data | ||||
Models |
S-Closed loop |
P12.XZ100S |
P12.XZ100K |
Units |
K-Open loop |
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Active axes |
X、Z |
X、Z |
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Drive control |
2 driving channels 2 sensing channels |
2 driving channels |
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Motion and Positioning |
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Travel range(0~120V) |
80 |
80 |
µm/±10% |
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Travel range(0~150V) |
100 |
100 |
µm/±10% |
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Integrated sensor |
SGS |
- |
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Aperture |
Ø25/Ø35 |
Ø25/Ø35 |
mm |
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Resolution |
3 |
1 |
nm,typ. |
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Closed-loop linearity |
0.12 |
- |
%F.S. |
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Repeatability |
0.08 |
- |
%F.S. |
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Pitch/Yaw/Roll |
<10 |
<10 |
µrad |
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Mechanical properties |
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Push/pull force capacity in motion direction |
25/8 |
25/8 |
N |
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Stiffness in motion direction |
0.25 |
0.25 |
N/µm±20% |
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Unloaded resonant frequency |
200 |
200 |
Hz±20% |
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Unloaded step time |
30 |
0.8 |
ms±20% |
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Closed-loop operating frequency(-3dB) |
- |
- |
Hz±20% |
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Load capacity |
0.6 |
0.6 |
Kg |
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Electrical capacitance |
1.8 |
1.8 |
μF/axis±20% |
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Material |
Steel, Aluminum |
Steel, Aluminum |
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Mass |
200 |
200 |
g±5% |
Note: Max driving voltage could be -20V~150V, recommended voltage 0~120V for long-term, high-reliability operation. Technical data is measured by CoreMorrow E00/E01 series piezo controller.
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