P17.XY15 Piezo Scanners, 15µm, ApertureΦ25mmCurrent Location:Product Homepage >> XY Piezo Nanopositioner>>P17.XY15 Piezo Scanners, 15µm, ApertureΦ25mm
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P17.XY15 piezoelectric scanning stage is an XY-axis translation scanning platform. The center has a aperture size of 25×27.5mm. The product is small in size and stable in performance. P17.XY15 scanning platform is an open-loop version and has excellent dynamics, suitable for dynamic scanning applications.


Characteristics


 Travel to 15μm

 Load capacity to 0.2kg

 Aperture size:25×27.5mm

 Sub-nm resolution

 Available UHV version 




Appearance

Moving-part

Amplified-driving

Large Stiffness, High Resolution

N65 adopts direct drive mechanism design and built-in high-performance piezoelectric ceramics. It is based on an open-loop version with ultra-high resolution of 0.2nm. The excellent structural design makes it have a high stiffness of 3N/μm, and the XY axis no-load resonant frequency can reach 1KHz. This product is ideal for high-speed scanning applications.

Freqency VS Load Curve

Step Time

N65 series piezoelectric scanning stage is equipped with CoreTomorrow's high-power E00/E01 series piezo controller, which can realize a step time of 1.5ms.


Applications


 Microscopic imaging

 Surface inspection

 Interference/metering

 Precision positioning

 Infrared Thermal Imaging

 Semiconductor Testing

    Technical data

Models

Suffix K-Open loop

P17.XY15K

Units

Active axis

XY

 

Drive control

2 driving channels

 

Travel range0~120V

12/axis

μm±10%

Max.travel range0~150V

15/axis

μm±10%

Aperture size

25×27.5

mm

Resolution

0.2

nm

Pitch/yaw/roll

<5

μrad

Push/pull force

30/3

N

Stiffness in motion direction

X3/Y3

N/μm±20%

Unloaded resonant frequency

X1000/Y1000

Hz±20%

Unloaded step time

1.5

ms±20%

Load capacity

Horizontal

0.2

kg

Vertical
0.05
Inverted
0.2

El.capacitance

0.7/axis

μF±20%

Material

Aluminum

 

Mass

55

g±5%

Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime.

Technical data are measured by CoreMorrow E00/E01 series piezo controller.


Mounting Method Horizontal Mounting
Vertical Mounting
Inverted Mounting
Definition
   Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane.
PS: Default direction for carrying capacity in the parameter table

  Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity 
PS:There are multiple vertical installation methods, and the technical data corresponds to the minimum load capacity

  Place the PZT platform horizontally, but the moving surface is located below the PZT platform

Diagram


Note

When the mounting method is selected as vertical mounting, pay attention to the outlet port

    Drawings(Click on the picture to enlarge it)
     Downloads
Auto CAD PDF

Step

Specs Sheet
Manual

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