P17.XY15 Piezo Scanners, 15µm, ApertureΦ25mmCurrent Location:Product Homepage >> XY Piezo Nanopositioner>>P17.XY15 Piezo Scanners, 15µm, ApertureΦ25mm
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P17.XY15 piezoelectric scanning stage is an XY-axis translation scanning platform. The center has a aperture size of 25×27.5mm. The product is small in size and stable in performance. P17.XY15 scanning platform is an open-loop version and has excellent dynamics, suitable for dynamic scanning applications.


Characteristics


 Travel to 15μm

 Load capacity to 0.2kg

 Aperture size:25×27.5mm

 Sub-nm resolution

 Available UHV version 




Appearance

Moving-part

Amplified-driving

Large Stiffness, High Resolution

N65 adopts direct drive mechanism design and built-in high-performance piezoelectric ceramics. It is based on an open-loop version with ultra-high resolution of 0.2nm. The excellent structural design makes it have a high stiffness of 3N/μm, and the XY axis no-load resonant frequency can reach 1KHz. This product is ideal for high-speed scanning applications.

Freqency VS Load Curve

Step Time

N65 series piezoelectric scanning stage is equipped with CoreTomorrow's high-power E00/E01 series piezo controller, which can realize a step time of 1.5ms.


Applications


 Microscopic imaging

 Surface inspection

 Interference/metering

 Precision positioning

 Infrared Thermal Imaging

 Semiconductor Testing

    Technical data

Models

Suffix K-Open loop

P17.XY15K

Units

Active axis

XY

 

Drive control

2 driving channels

 

Travel range0~120V

12/axis

μm±10%

Travel range0~150V

15/axis

μm±10%

Aperture size

25×27.5

mm

Resolution

0.2

nm

Pitch/yaw/roll

<5

μrad

Push/pull force

30/3

N

Stiffness in motion direction

X3/Y3

N/μm±20%

Unloaded resonant frequency

X1000/Y1000

Hz±20%

Unloaded step time

1.5

ms±20%

Load capacity

0.2

kg

El.capacitance

0.7/axis

μF±20%

Material

Aluminum

 

Mass

55

g±5%

Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime.

Technical data are measured by CoreMorrow E00/E01 series piezo controller.

    Drawings(Click on the picture to enlarge it)
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Step

Specs Sheet
Manual

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