- Introduction
- Controllers
- Feedback
P17 is an XY scanning stage specially developed for applications requiring large aperture and large displacement. The scanner adopts amplification mechanism and built-in high-reliability piezo actuators, which could realize the scanning range of 187.5μm. It has been widely used in the fields of precise positioning and scanning microscopy .
Characteristics
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Appearance 
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Moving-part 
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Amplified-driving 
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Large Aperture, Large Displacement
P17 is fast and high-precision scanning stage to could realize stroke of 187.5μm/axis. Excellent structural design without friction, high guiding precision, quick response time to 5ms. |
Freqency VS Load Curve 
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Application Cases-Wafer Positioning P17 is used in conjunction with CoreMorrow piezo objective scanner for wafer positioning, the wafer could be driven to perform nano-scale precision positioning of 187.5μm displacement. 
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Applications
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| Technical data | |||
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Models |
S-Closed loop K-Open loop |
P17.XY200S P17.XY200K |
Untis |
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Active axes |
X、Y |
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Drive control |
2 driving channels 2 sensing channels |
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Travel range(0~120V) |
150/axis |
μm±10% |
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Max.travel range(0~150V) |
187.5/axis |
μm±10% |
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Integrated sensor |
SGS/- |
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Aperture |
60×60 |
mm |
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Closed/open loop resolution |
5/1.5 |
nm |
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Closed-loop linearity |
0.1/- |
%F.S |
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Repeatability |
0.05/- |
%F.S |
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Pitch/Yaw/Roll |
<15 |
μrad |
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Push/pull force capacity |
40/15 |
N |
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Stiffness |
X0.2/Y0.2 |
N/μm±20% |
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Unloaded resonant frequency |
X240/Y400 |
Hz±20% |
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Closed/open-loop unloaded Step time |
30/5 |
ms±20% |
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Closed-loop operating frequency（-3dB） |
25（@28g load）/- |
Hz±20% |
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Load capacity |
Horizontal |
1 |
kg |
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Vertical |
0.07 | ||
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Inverted |
1 | ||
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Electrical capacitance |
3.6/axis |
μF±20% |
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Material |
Steel, Aluminum |
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Mass |
660 |
g±5% |
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Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime.
Technical data are measured by CoreMorrow E00/E01 series piezo controller.
| Mounting Method |
Horizontal Mounting |
Vertical Mounting |
Inverted Mounting |
| Definition |
Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane.
PS: Default direction for carrying capacity in the parameter table
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Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity
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Place the PZT platform horizontally, but the moving surface is located below the PZT platform |
| Diagram |
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| Note |
When the mounting method is selected as vertical mounting, pay attention to the outlet port |
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Piezo · Nano · Motion
