P16.XY100 series piezoelectric scanner is an XY-axis translation scanning platform adopting amplifying mechanism. The center through-hole aperture is 20mm. The series of scanners are available in ±50μm travels, and the open-loop/closed loop is optional.
Characteristics
Travel to ±50μm |
Load capacity to 1.5kg |
Aperture:Ø 20mm |
Closed loop for higher repeatability |
Optional open/closed loop |
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Appearance |
Moving-part |
Amplified-driving |
High Stiffness Large Load Capacity
P16.XY100 piezo scanner adopts principle of mechanism amplification design and built-in high-performance piezo ceramic. It can realize travel of ±50μm. The integrated structure design has no coupling of XY axis motion. |
P16.XY100 Curve |
Application Cases-XY Adjustment P16.XY piezo scanner is used in optical path adjustment experiment with its large load and high frequency. P16 carrying mirror frame to move precisely in XY axis. |
Applications
Microscopic imaging |
Optical |
Precision positioning |
Surface inspection |
Micro-operation |
Interference/metering |
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Technical data | ||||
Models |
S-Closed loop |
P16.XY100S |
P16.XY100K |
Units |
Active axis |
X、Y |
X、Y |
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Driving channels |
3 driving channels |
3 driving channels 2 sensing channels |
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Travel range |
±33/axis(0~100V) |
±40/axis(0~120V) |
μm±10% |
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Travel range |
±40/axis(0~120V) |
±50/axis(0~150V) |
μm±10% |
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Sensor type |
SGS/ |
- |
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Aperture size |
Ø20 |
Ø20 |
mm |
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Resolution |
2.5 |
1 |
nm |
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Linearity |
1 |
- |
%F.S |
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Repeatability |
0.5 |
- |
%F.S |
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Pitch/yaw/roll |
<25 |
<25 |
μrad |
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Push/pull force |
30/30 |
30/30 |
N |
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Stiffness in motion direction |
0.5 |
0.5 |
N/μm±20% |
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Unloaded resonant frequency |
600 |
600 |
Hz±20% |
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Unloaded step time |
10 |
1.6 |
ms±20% |
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Load capacity |
1.5 |
1.5 |
kg |
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El.capacitance |
3.6/axis |
3.6/axis |
μF±20% |
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Material |
Steel, Al |
Steel, Al |
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Mass |
220 |
220 |
g±5% |
Note: Above parameters are measured with the E00/E01 series piezo controller. The maximum driving voltage can be -20V~150V; for high reliability long-term use, the recommended driving voltage is 0~120V.
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