P12.XY Piezo Scanners, 100µm, With Ø25 or Ø35 apertureCurrent Location：Product Homepage >> XY Piezo Nanopositioner>>P12.XY Piezo Scanners, 100µm, With Ø25 or Ø35 aperture
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P12.XY100 is XY-axes scanning stage. The aperture diameter could be selected as 25mm(35mm is optional), which is suitable for applications such as microscopy. The piezo scanner could realize single-axis displacement of 100μm. Integrated structure makes multi-dimensional motion uncoupled and could be selected in various specifications to meet the needs of different applications.


Characteristics


 XY axes

 Max stroke to 100μm

 Max load to 0.7kg

 With Ø25 or Ø35 aperture


Appearance

P12.X moving part

Amplified-driving

1~3 - Axis Scanning Stage

P12 piezo nanopositioning stage is a 1~3-axis linear piezo scanning stage, including X, Z, XY, XZ, XYZ motion versions. A variety of specifications and models for choice with optional aperture diameter of 25mm or 35mm.

Freqency VS Load Curve

Application case-Inverted Piezo Scanner


Applications


 Scanning interference

 Confocal microscopy

 Wafer positioning

 Surface measurement

 Image processing and stabilization

 Optical capture



    Technical data

Models

S-Closed loop

K-Open loop

P12.XY100S

P12.XY100K

Units

Active axes

X、Y

 

Drive control

2 driving channels 2 sensing channels

 

Travel range(0~120V)

80/axis

μm±10%

Travel range(0~150V)

100/axis

μm±10%

Integrated sensor

SGS/-

 

Aperture

Ø25/Ø35

mm

Closed/open loop resolution

3/1

nm

Closed-loop linearity

0.1/-

%F.S

Repeatability

0.05/-

%F.S

Pitch/Yaw/Roll

<10

μrad

Push/pull force capacity

25/8

N

Stiffness

X0.25/Y0.3

N/μm±20%

Unloaded resonant frequency

X180/Y230

Hz±20%

Closed/open-loop unloaded Step time

15/0.8

ms±20%

Closed-loop operating frequency（-3dB）

50（unloaded）

Hz±20%

Load capacity

0.7

kg

Electrical capacitance

1.8/axis

μF±20%

Material

Steel, Aluminum

 

Mass

200

g±5%

Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime. 

Technical data are measured by CoreMorrow E00/E01 series piezo controller.

    Drawings（Click on the picture to enlarge it）
    Drawings（Click on the picture to enlarge it）
     3D diagram presentation
     3D diagram presentation
     Downloads
Auto CAD PDF
Step

Specs Sheet

P12.XY100 φ25

P12.XY100 φ35

Manual
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