P18.XY200 Piezo Scanners, 250µm, ApertureΦ35mmCurrent Location:Product Homepage >> XY Piezo Nanopositioner>>P18.XY200 Piezo Scanners, 250µm, ApertureΦ35mm
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P18.XY200 is XY axes motion piezo linear scanner. It adopts amplified mechanism and built-in high-reliability piezo actuators, which could realize high-speed scanning up to 250μm. The aperture is Ø35mm, and various displacement strokes and specifications are available for selection. It is suitable for large-travel multi-dimensional scanning applications.


Features


 XY axis motion

 max stroke to 250μm

 Max load to 1.5kg

 Aperture:Ø35mm

 Quick response time


Appearance

Moving-part

Direct-driving

Large Stroke, Large Load Capacity

P18.XY200 is built with high-reliability PZT, which could achieve the displacement up to 250μm. Closed-loop version could be selected to achieve excellent linearity and repeatability.
Max load capacity is up to 1.5kg and unload resonant frequency could be up to 450Hz. Matching CoreMorrow piezo controller, the step time could be up to 5ms. It is deal for applications such as precision machining, semiconductor manufacturing, and scanning microscopy.

Freqency VS Load Curve

High Positioning Accuracy


Applications


 Surface inspection

 Scanning microscopy

 Interference/metering

  Image processing and stabilization

 Optical metrology

 Semiconductor measurement

    Technical data

Models

S-Closed loop

K-Open loop

P18.XY200S

P18.XY200K

Units

Active axes

XY

 

Drive control

2 driving channels
2 sensing channels

 

Travel range(0~120V)

200/axis

μm±10%

Travel range(0~150V)

250/axis

μm±10%

Integrated sensor

SGS/-

 

Aperture

Ø35

mm

Closed/open loop resolution

7/2

nm

Closed-loop linearity

0.2/-

%F.S

Repeatability

0.15/-

%F.S

Pitch/Yaw/Roll

<10

μrad

Push/pull force capacity

60/20

N

Stiffness

X0.3/Y0.3

N/μm±20%

Unloaded resonant frequency

X200/Y450

Hz±20%

Closed/open-loop unloaded Step time

50/5

ms±20%

Closed-loop operating frequency(-3dB)

-

Hz±20%

Load capacity

1.5

kg

Electrical capacitance

11/axis

μF±20%

Material

Aluminum

 

Mass

 360

g±5%

Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime. Technical data are measured by CoreMorrow E00/E01 series piezo controller.

Technical data are measured by CoreMorrow E00/E01 series piezo controller.

    Drawings(Click on the picture to enlarge it)
     Downloads
Auto CAD PDF
Step
Specs Sheet
Manual
     3D diagram presentation

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