P18.XY200 is XY axes motion piezo linear scanner. It adopts amplified mechanism and built-in high-reliability piezo actuators, which could realize high-speed scanning up to 250μm. The aperture is Ø35mm, and various displacement strokes and specifications are available for selection. It is suitable for large-travel multi-dimensional scanning applications.
Features
XY axis motion |
max stroke to 250μm |
Max load to 1.5kg |
Aperture:Ø35mm |
Quick response time |
Appearance |
Moving-part |
Direct-driving |
Large Stroke, Large Load Capacity
P18.XY200 is built with high-reliability PZT, which could achieve the displacement up to 250μm. Closed-loop version could be selected to achieve excellent linearity and repeatability. |
Freqency VS Load Curve |
High Positioning Accuracy |
Applications
Surface inspection |
Scanning microscopy |
Interference/metering |
Image processing and stabilization |
Optical metrology |
Semiconductor measurement |
Technical data | ||||
Models |
S-Closed loop K-Open loop |
P18.XY200S P18.XY200K |
Units |
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Active axes |
X、Y |
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Drive control |
2 driving channels |
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Travel range(0~120V) |
200/axis |
μm±10% |
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Travel range(0~150V) |
250/axis |
μm±10% |
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Integrated sensor |
SGS/- |
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Aperture |
Ø35 |
mm |
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Closed/open loop resolution |
7/2 |
nm |
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Closed-loop linearity |
0.2/- |
%F.S |
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Repeatability |
0.15/- |
%F.S |
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Pitch/Yaw/Roll |
<10 |
μrad |
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Push/pull force capacity |
60/20 |
N |
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Stiffness |
X0.3/Y0.3 |
N/μm±20% |
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Unloaded resonant frequency |
X200/Y450 |
Hz±20% |
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Closed/open-loop unloaded Step time |
50/5 |
ms±20% |
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Closed-loop operating frequency(-3dB) |
- |
Hz±20% |
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Load capacity |
1.5 |
kg |
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Electrical capacitance |
11/axis |
μF±20% |
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Material |
Aluminum |
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Mass |
360 |
g±5% |
Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime. Technical data are measured by CoreMorrow E00/E01 series piezo controller.
Technical data are measured by CoreMorrow E00/E01 series piezo controller.
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