P12.X100 is X-axis scanning stage. The aperture diameter could be selected as 25mm(35mm is optional), which is suitable for applications such as microscopy. The piezo scanner could realize single-axis displacement of 100μm. Integrated structure makes multi-dimensional motion uncoupled and could be selected in various specifications to meet the needs of different applications.
Characteristics
X axis |
Max stroke to 100μm |
Max load to 0.8kg |
With Ø25 or Ø35 aperture |
Appearance |
P12.X moving part |
Amplified-driving |
1~3 - Axis Scanning Stage P12 piezo nanopositioning stage is a 1~3-axis linear piezo scanning stage, including X, Z, XY, XZ, XYZ motion versions. A variety of specifications and models for choice with optional aperture diameter of 25mm or 35mm. |
Freqency VS Load Curve |
Application case-Inverted Piezo Scanner |
Applications
Scanning interference |
Confocal microscopy |
Wafer positioning |
Surface measurement |
Image processing and stabilization |
Optical capture |
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Technical Data | ||||
Type |
S-Closed loop |
P12.X100S |
P12.X100K |
Units |
K-Open loop |
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Active axes |
X |
X |
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Drive control |
1 driving channel 1 sensing channel |
1 driving channel |
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Travel range(0~120V) |
80 |
80 |
µm±10% |
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Travel range(0~150V) |
100 |
100 |
µm±10% |
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Sensor |
SGS |
- |
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Aperture |
Ø25/Ø35 |
Ø25/Ø35 |
mm |
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Resolution |
3 |
1 |
nm,typ. |
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Linearity |
0.05 |
- |
%F.S. |
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Repeatability |
0.02 |
- |
%F.S. |
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Pitch/yaw/roll |
<10 |
<10 |
µrad |
|
Push/pull force |
30/10 |
30/10 |
N |
|
Stiffness |
0.3 |
0.3 |
N/µm±20% |
|
Unloaded resonant frequency |
0.23 |
0.23 |
kHz±20% |
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Closed/open-loop |
10 |
0.8 |
ms±20% |
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Closed-loop operating frequency(-3dB) |
- |
- |
Hz±20% |
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Load capacity |
0.8 |
0.8 |
Kg |
|
El. capacitance |
1.8 |
1.8 |
μF/axis±20% |
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Material |
Steel, Aluminum |
Steel, Aluminum |
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Mass |
140 |
140 |
g±5% |
Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime.
Technical data are measured by CoreMorrow E00/E01 series piezo controller.
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