P12.X100 is X-axis scanning stage. The aperture diameter could be selected as 25mm(35mm is optional), which is suitable for applications such as microscopy. The piezo scanner could realize single-axis displacement of 100μm. Integrated structure makes multi-dimensional motion uncoupled and could be selected in various specifications to meet the needs of different applications.
Characteristics
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Appearance ![]() |
P12.X moving part ![]() |
Amplified-driving ![]() |
1~3 - Axis Scanning Stage P12 piezo nanopositioning stage is a 1~3-axis linear piezo scanning stage, including X, Z, XY, XZ, XYZ motion versions. A variety of specifications and models for choice with optional aperture diameter of 25mm or 35mm. |
Freqency VS Load Curve ![]() |
Application case-Inverted Piezo Scanner ![]() |
Applications
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Technical Data | ||||
Type |
S-Closed loop |
P12.X100S-D |
P12.X100K-D |
Units |
K-Open loop |
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Active axes |
X |
X |
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Drive control |
1 driving channel 1 sensing channel |
1 driving channel |
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Travel range(0~120V) |
80 |
80 |
µm±10% |
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Max.travel range(0~150V) |
100 |
100 |
µm±10% |
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Sensor |
SGS |
- |
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Aperture |
Ø25/Ø35 |
Ø25/Ø35 |
mm |
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Resolution |
3 |
1 |
nm,typ. |
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Linearity |
0.05 |
- |
%F.S. |
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Repeatability |
0.02 |
- |
%F.S. |
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Pitch/yaw/roll |
<10 |
<10 |
µrad |
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Push/pull force |
30/10 |
30/10 |
N |
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Stiffness |
0.3 |
0.3 |
N/µm±20% |
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Unloaded resonant frequency |
0.23 |
0.23 |
kHz±20% |
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Closed/open-loop |
10 |
0.8 |
ms±20% |
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Closed-loop operating frequency(-3dB) |
- |
- |
Hz±20% |
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Load capacity |
Horizontal |
0.8 |
0.8 |
Kg |
Vertical |
0.05 | 0.05 | ||
Inverted |
0.8 | 0.8 | ||
El. capacitance |
1.8 |
1.8 |
μF/axis±20% |
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Material |
Steel, Aluminum |
Steel, Aluminum |
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Mass |
140 |
140 |
g±5% |
Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime.
Technical data are measured by CoreMorrow E00/E01 series piezo controller.
Mounting Method |
Horizontal Mounting |
Vertical Mounting |
Inverted Mounting |
Definition |
Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane.
PS: Default direction for carrying capacity in the parameter table
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Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity
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Place the PZT platform horizontally, but the moving surface is located below the PZT platform |
Diagram |
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Note |
When the mounting method is selected as vertical mounting, pay attention to the outlet port |
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