P18.X300 Piezo Scanners, ±187.5μm, ApertureΦ35mmCurrent Location：Product Homepage >> X/Z Piezo Nanopositioner>>P18.X300 Piezo Scanners, ±187.5μm, ApertureΦ35mm
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P18.X300 is X axis motion piezo linear scanner. It adopts amplified mechanism and built-in high-reliability piezo actuators, which could realize high-speed scanning up to ±187.5μm. The aperture is Ø35mm, and various displacement strokes and specifications are available for selection. It is suitable for large-travel multi-dimensional scanning applications.


Features


 X axis motion

 max stroke to ±187.5μm

 Max load to 3.5kg

 Aperture：Ø35mm

 Quick response time


Appearance

Moving-part

Direct-driving

Large Stroke, Large Load Capacity

P18 built with high-reliability PZT could achieve the displacement up to ±187.5μm. Closed-loop version could be selected to achieve excellent linearity and repeatability.
Max load capacity is up to 3.5kg and unloaded resonant frequency could be up to 600Hz. Matching CoreMorrow piezo controller, the step time could be up to 5ms. It is ideal for applications such as precision machining, semiconductormanufacturing, and scanning microscopy.

Freqency VS Load Curve

High Positioning Accuracy


Applications


 Surface inspection

 Scanning microscopy

 Interference/metering

  Image processing and stabilization

 Optical metrology

 Semiconductor measurement

    Technical data

Models

S-Closed loop

K-Open loop

P18.X300S

P18.X300K

Units

Active axes

X

 

Drive control

2 driving channels
1 sensing channel

 

Travel range(0~120V)

±150

μm±10%

Travel range(0~150V)

±187.5

μm±10%

Integrated sensor

SGS/-

 

Aperture

Ø35

mm

Closed/open loop resolution

10/3

nm

Closed-loop linearity

0.2/-

%F.S

Repeatability

0.15/-

%F.S

Pitch/Yaw/Roll

<15

μrad

Push/pull force capacity

150/150

N

Stiffness

0.5

N/μm±20%

Unloaded resonant frequency

600

Hz±20%

Closed/open-loop unloaded Step time

30/10

ms±20%

Closed-loop operating frequency（-3dB）

-

Hz±20%

Load capacity

3.5

kg

Electrical capacitance

21.6

μF±20%

Material

Aluminum

 

Mass

220

g±5%

Note: Max driving voltage could be -20V~150V, Recommended voltage 0~120V for long-term operation to extend lifetime. Technical data are measured by CoreMorrow E00/E01 series piezo controller.

Technical data are measured by CoreMorrow E00/E01 series piezo controller.

    Drawings（Click on the picture to enlarge it）
     Downloads
Auto CAD PDF
Step
Specs Sheet
Manual
     3D diagram presentation

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