XP-780X Piezo Scanners, Aperture 25×25mmCurrent Location:Product Homepage >> X/Z Piezo Nanopositioner>>XP-780X Piezo Scanners, Aperture 25×25mm
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XP-780 piezo scanner adopts amplification mechanism, flexible hinge design and high-reliability piezo actuator to realize displacement of X-axis up to 200μm, and could be configured with closed-loop sensor for high-precision scanning and positioning. The size of aperture is 25mm x 25mm. It could realize 2 or 3 axes motion by superimposing.


Characteristics


 Max stroke to 200μm

 Max load to 5kg

 Aperture:25×25mm

 Open/closed loop is optional

 Available UHV version

 Closed-loop version for high repeatability




Appearance

Moving Part

Amplified-driving

Large Stroke Large Load Capacity

XP-780 adopts amplified mechanism, which could realize stroke up to 200μm. Flexible guide mechanism without friction makes it have high resolution. Selecting closed-loop sensor could realize nanometer level. The aperture makes it suitable for applications such as micro scanning.
The excellent structure makes it have very high rigidity and large load capacity, and could load 5kg sample for precise positioning.

Testing

Freqency VS Load Curve


Applications


 Biotechnology

 Interference

 Wafer positioning

 SPM

 Measurement

 Surface structure analysis



    Technical data

Models

S-Closed loop

K-Open loop

XP-780.XS

XP-780.XK

Units

Active axes

X

 

Drive control

1 driving channel 

1 sensing channel

 

Travel range(0~120V)

160

μm±20%

Travel range(0~150V)

200

μm±20%

Integrated sensor

SGS/-

 

Aperture

25×25

mm

Closed/open loop resolution

5.5/2

nm

Closed-loop linearity

0.1/-

%F.S

Repeatability

0.05/-

%F.S

Pitch/Yaw/Roll

<50

μrad

Push/pull force capacity

80/40

N

Stiffness

0.5

N/μm±20%

Unloaded resonant frequency

200

Hz±20%

Closed/open-loop unloaded step time

20/5

ms±20%

Load capacity

5

kg

Electrical capacitance

11

μF±20%

Material

Aluminum

 

Mass

240

g±5%

Note: Above parameters are measured with the E00/E01 series piezo controller. The maximum driving voltage can be -20V~150V; for high reliability long-term use, the recommended driving voltage is 0~120V.

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X

XY

XYZ

Step
Specs Sheet
Manual
     3D diagram presentation

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