XP-780 piezo scanner adopts amplification mechanism, flexible hinge design and high-reliability piezo actuator to realize displacement of X-axis up to 200μm, and could be configured with closed-loop sensor for high-precision scanning and positioning. The size of aperture is 25mm x 25mm. It could realize 2 or 3 axes motion by superimposing.
Characteristics
Max stroke to 200μm |
Max load to 5kg |
Aperture:25×25mm |
Open/closed loop is optional |
Available UHV version |
Closed-loop version for high repeatability |
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Appearance |
Moving Part |
Amplified-driving |
Large Stroke Large Load Capacity
XP-780 adopts amplified mechanism, which could realize stroke up to 200μm. Flexible guide mechanism without friction makes it have high resolution. Selecting closed-loop sensor could realize nanometer level. The aperture makes it suitable for applications such as micro scanning. |
Testing |
Freqency VS Load Curve |
Applications
Biotechnology |
Interference |
Wafer positioning |
SPM |
Measurement |
Surface structure analysis |
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Technical data | |||
Models |
S-Closed loop K-Open loop |
XP-780.XS XP-780.XK |
Units |
Active axes |
X |
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Drive control |
1 driving channel 1 sensing channel |
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Travel range(0~120V) |
160 |
μm±20% |
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Travel range(0~150V) |
200 |
μm±20% |
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Integrated sensor |
SGS/- |
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Aperture |
25×25 |
mm |
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Closed/open loop resolution |
5.5/2 |
nm |
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Closed-loop linearity |
0.1/- |
%F.S |
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Repeatability |
0.05/- |
%F.S |
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Pitch/Yaw/Roll |
<50 |
μrad |
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Push/pull force capacity |
80/40 |
N |
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Stiffness |
0.5 |
N/μm±20% |
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Unloaded resonant frequency |
200 |
Hz±20% |
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Closed/open-loop unloaded step time |
20/5 |
ms±20% |
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Load capacity |
5 |
kg |
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Electrical capacitance |
11 |
μF±20% |
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Material |
Aluminum |
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Mass |
240 |
g±5% |
Note: Above parameters are measured with the E00/E01 series piezo controller. The maximum driving voltage can be -20V~150V; for high reliability long-term use, the recommended driving voltage is 0~120V.
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