S21 θz Piezo Rotation Platform, 7.5mrad, 1.1kHzCurrent Location:Product Homepage >> Piezo Rotation Stages>>S21 θz Piezo Rotation Platform, 7.5mrad, 1.1kHz
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S21 series piezoelectric rotation stage is a one-dimensional θz rotary stage with small size, a maximum rotation angle of 7.5mrad and a load capacity of 0.1kg, which can drive the lens to make precise rotary motion.


Characteristics


 θz rotation

 Rotation angle range to 7.5mrad

 Closed loop for high accuracy

 Fast response

 Small size





Appearance

Moving Part

Step Time-30ms

Small Size, High Resolution and Accuracy

S21 adopts principle of mechanism amplification design, which can achieve maximum rotation of 7.5mrad. It is very compact, and its size is only 60×60×15mm. It is very easy to integrate into precision rotating equipment.
The stage body adopts flexible hinge mechanism, could achieve resolution to 0.2μrad. Closed-loop version with SGS sensor can realize positioning accuracy of micro-radians usd in precise adjustment of the optical path.

Driving and Control

S21 rotation stage needs a piezo controller with 1-channel voltage output. The S21 closed-loop version can be equipped with E01 series closed-loop controller to realize θz high-precision rotary positioning control.

Application Case-Precision Positionin

S21 piezo rotation stage can be used with CoreTomorrow's any linear or tilting stage to form a multi-axis precision positioning operations.

Frequency and Load Curve


Applications


 Optical path adjustment

 Interference

 Beam scanning

 Metrology

    Technical data

Models

S - closed loop

K - open  loop

S21.R7S

S21.R7K

Units

Active axis

θz

θz

 

Drive control

θ1 driving channel 1 sensing channel

θ1 driving channel

 

Rotation angle(0~+120V)

6(≈1240"

6(≈1240"

mrad±20%

Rotation angle(0~+150V)

7.5(≈1500"

7.5(≈1500"

mrad±20%

Sensor type

SGS

-

 

Resolution

0.2(≈0.04"

0.1(≈0.02"

μrad

Closed-loop linearity

0.5

-

%F.S.

Closed-loop repeatability

0.2

-

%F.S.

Push/pull force

10/5

10/5

N

Stiffness in motion direction

1

1

N/μm±20%

Unloaded resonant frequency

1.1

1.1

kHz±20%

Unloaded step time

30

1.5

ms±20%

Load capacity

0.1

0.1

kg

El.capacitance

1.8

1.8

μF±20%

Material

Aluminum

Aluminum

 

Mass

105

105

g±5%

Note: Above parameters are measured with the E00/E01 series piezo controller. The maximum driving voltage can be -20V~150V; for high reliability long-term use, the recommended driving voltage is 0~120V.

    Drawings(Click on the picture to enlarge it)
     Downloads
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Step
Specs Sheet
Manual
     3D diagram presentation

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