S21 series piezoelectric rotation stage is a one-dimensional θz rotary stage with small size, a maximum rotation angle of 7.5mrad and a load capacity of 0.1kg, which can drive the lens to make precise rotary motion.
Characteristics
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Appearance ![]() |
Moving Part ![]() |
Step Time-30ms ![]() |
Small Size, High Resolution and Accuracy
S21 adopts principle of mechanism amplification design, which can achieve maximum rotation of 7.5mrad. It is very compact, and its size is only 60×60×15mm. It is very easy to integrate into precision rotating equipment. |
Driving and Control
S21 rotation stage needs a piezo controller with 1-channel voltage output. The S21 closed-loop version can be equipped with E01 series closed-loop controller to realize θz high-precision rotary positioning control. |
Application Case-Precision Positionin S21 piezo rotation stage can be used with CoreTomorrow's any linear or tilting stage to form a multi-axis precision positioning operations. ![]() |
Frequency and Load Curve ![]() |
Applications
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Technical data | ||||
Models |
S - closed loop K - open loop |
S21.R7S |
S21.R7K |
Units |
Active axis |
θz |
θz |
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Drive control |
θ1 driving channel 1 sensing channel |
θ1 driving channel |
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Rotation angle(0~+120V) |
6(≈1240") |
6(≈1240") |
mrad±20% |
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Rotation angle(0~+150V) |
7.5(≈1500") |
7.5(≈1500") |
mrad±20% |
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Sensor type |
SGS |
- |
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Resolution |
0.2(≈0.04") |
0.1(≈0.02") |
μrad |
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Closed-loop linearity |
0.5 |
- |
%F.S. |
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Closed-loop repeatability |
0.2 |
- |
%F.S. |
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Push/pull force |
10/5 |
10/5 |
N |
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Stiffness in motion direction |
1 |
1 |
N/μm±20% |
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Unloaded resonant frequency |
1.1 |
1.1 |
kHz±20% |
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Unloaded step time |
30 |
1.5 |
ms±20% |
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Load capacity |
0.1 |
0.1 |
kg |
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El.capacitance |
1.8 |
1.8 |
μF±20% |
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Material |
Aluminum |
Aluminum |
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Mass |
105 |
105 |
g±5% |
Note: Above parameters are measured with the E00/E01 series piezo controller. The maximum driving voltage can be -20V~150V; for high reliability long-term use, the recommended driving voltage is 0~120V.
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