Characteristics
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Technical Data | |||
Type |
S38.T1S |
S38.T2S |
Units |
Active axes |
θx、θy |
θx、θy |
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Drive control |
3 driving channels 2 sensing channels |
3 driving channels 2 sensing channels |
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Tilt angle(0~100V) |
1 or ±0.5(≈±103") |
2 or ±1(≈±206") |
mrad/axis±20% |
Tilt angle(0~120V) |
1.2 or ±0.6(≈±123") |
2.4 or ±1.2(≈±247") |
mrad/axis±20% |
Integrated sensor |
SGS/- |
SGS/- |
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Resolution |
0.03(<0.01″) /0.01(<0.01″) |
0.07(≈0.01″) /0.02(<0.01″) |
μrad |
Linearity |
0.3/- |
0.4/- |
%F.S |
Repeatability |
0.1/- |
0.2/- |
%F.S |
Unloaded resonant frequency |
7000 |
2000 |
Hz±20% |
Closed-loop operating frequency |
400(@100g load) |
- |
Hz±20% |
El. capacitance |
1.6 |
3.6 |
μF/axis±20% |
Material |
Steel, cuprum |
Steel, cuprum |
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Mass(with no cable) |
50 |
60 |
g±5% |
Tilt angle vs voltage curve |
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Linearity curve |
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