Technical data
Active axis	θx θy
Tilt angle（0~100V）	±4mrad±20%
Sensor type	SGS
Unloaded resonant frequency	2000Hz±20%
Resonant frequency@Ø12×8 mirror	1450Hz±20%
El.capacitance	3.6μF/axis±20%
Operating frequency/Tilt angle	1000Hz/±0.4mrad、600Hz/±0.9mrad，±20%
Material	Titanium alloy
Vibration grade	＞10g

Drawings（Click on the picture to enlarge it）

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