S30 is θx, θy piezo tip/tilt platform, which is designed for highly-dynamic applications, with unloaded resonance frequency up to 15kHz.
Features
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θx θy tilt motion ![]() |
Appearance ![]() |
Moving part ![]() |
Applications
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技术参数 | |||||
Type |
S - closed loop |
S30.T2SF |
S30.T2SY |
S30.T1KY |
Units |
Active axes |
θx、θy |
θx、θy |
θx、θy |
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Drive control |
3driving channel,2 sensing channel |
3driving channel,2 sensing channel |
3driving channel |
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Integrated sensor |
SGS/- |
SGS/- |
- |
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Tilt angle(0~120V) |
3/±1.5 (≈±309″) |
3/±1.5 (≈±309″) |
1.5/±0.75 (≈±154 ″) |
mrad±10% |
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Resolution |
0.1(≈0.02″)/ |
0.1(≈0.02″)/ |
0.02(<0.01″) |
μrad |
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Unloaded resonant frequency |
15 |
15 |
15 |
kHz±20% |
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Resonant frequency |
10 |
10 |
10 |
kHz±20% |
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Linearity |
0.2/- |
0.2/- |
- |
%F.S. |
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Repeatability |
0.1/- |
0.1/- |
- |
%F.S. |
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枢轴点至平台表面距离 |
4.2 |
4.2 |
4.2 |
mm±0.2mm |
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El. capacitance |
1.6//axis |
1.6//axis |
0.7//axis |
μF±10% |
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Material |
Titanium, steel |
Titanium, steel |
Titanium, steel |
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Mass(not include cable) |
35 |
30 |
20 |
g±5% |
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