Models

S - closed loop

K - open loop

P35.T20S

P35.T20K

P35.T40S

P35.T40K

Units

Active axis

θx θy

θx θy

Drive control

3 driving channels 2 sensing channels

3 driving channels

Tilt angle（0~120V）

22/±11(≈±2268″)

35/±17.5(≈±3600″)

mrad±20%

Tilt angle（0~150V）

27/±13.5(≈±2784″) 

43/±21.5(≈±4400″)

mrad±20%

Sensor type

SGS/-

SGS/-

Closed/open loop resolution

0.8(≈0.17″)/0.3(≈0.06″)

1.2(≈0.25″)/0.4(≈0.08″)

μrad

Closed-loop linearity

0.08/-

0.02/-

%F.S.

Closed-loop repeatability

0.04/-

0.014/-

%F.S.

Unloaded resonant frequency

1750

1500

Hz±20%

Resonant frequency

800(@25.4×4mm)

480(@10.6g) 
215(@30g) 

Hz±20%

Closed-loop operating frequency（-3dB）

-

25(@30g load)

Hz±20%

Closed/open loop step time@10.6g

-

10/1.2

ms±20%

Closed loop step time@30g

-

25

ms±20%

El.capacitance

7.2/axis

7.2/axis

μF±20%

Material

Titanium, aluminum

Mass

260

335

g±5%