P32.ZT4S/K θx,θy,Z Fast Steering Mirrors, 6mrad, 1kHzCurrent Location:Product Homepage >> Fast Steering Mirrors>>P32.ZT4S/K θx,θy,Z Fast Steering Mirrors, 6mrad, 1kHz
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P32 series Piezo Tip/Tilt and Z Platform provides high-speed precision tilt motion of two axes and Z-axis linear motion. The resolution of linear motion can reach sub-nanometer level, deflection resolution reaches sub-microradians, and response time can reach milliseconds. The P32.ZT4S/K series of piezoelectric deflection mirrors are compact, enabling up to 6mrad deflection and 37.5μm Z-axis linear motion.


Characteristics


  θx, θy and Z motion

 Tilt angle to 6mrad

 Sub-ms response time

 High closed loop positioning accuracy


θx θy Z motion

Optional mirror adapter

Integrated Piezo Deflection System

Frequency and Load Curves

Closed-loop Curve

Load Step Time

High Resolution, Stability and Dynamics

P32 is compact and internally assembled with pre-load, high-reliability piezo actuator integrated into complex, flexible hinge guidance system that is modeled and analyzed by FEA. Piezoelectric actuators are stacked co-fired piezoelectric ceramics that provide better performance and reliability than conventional piezoelectric actuators.
P32 uses a parallel-kinetic direct-drive tripod structure that provides optimum angular stability over a wide temperature range. This design has the advantages of smaller size, the same tilt range and dynamic performance of the two axes, faster response speed and better linearity, and also prevents polarization rotation, making it ideal for industrial applications.

Driving Principle

P32 piezo tip/tilt and Z platform is designed based on the mechanism drived by three piezo actuators that are placed at an angle intervals of 120°. In addition to tilting motion, this structural design also enables linear movement of the Z-direction, which can be used to correct the optical path length. In below drawing, A, B, C represent the measured displacement at the points, and the simple calculation formulas of the two-axis tilt angle and Z-direction displacement are as follows.


Applications


 Image processing and stabilization

 Laser scanning and beam deflection

 Laser tuning

 Optical capture

 Light filter / optical switch

 Optics/beam stabilization



    Technical data

Models

Suffix S - closed loop
Suffix K - open loop

P32.ZT4S

P32.ZT4K

Units

Active axes

θx θy Z

θx θy Z

 

Drive control

3 driving channels 3 sensing channels

3 driving channels

 

θx, θy Tilt angle0~120V

5(≈1030"

5(≈1030"

mrad±20%

Travel in Z0~120V

30

30

μm±20%

θx, θy tilt angle0~150V

6(≈1230")

6(≈1230")

mrad±20%

Travel in Z0~150V

37.5

37.5

μm±20%

Sensor type

SGS

-

 

Resolution in θx, θy

0.2(≈0.04"

0.05(≈0.01"

μrad

Resolution in Z

1

0.5

nm

Linearity

0.05

-

%F.S.

Repeatability

0.02

-

%F.S.

Unloaded resonant frequency(θx, θy

2

2

kHz±20%

Unloaded step time

5

2

ms±20%

El.capacitance

3.6/axis

3.6/axis

μF±20%

Material

Steel

Steel

 

Mass

300

300

g±5%

Note: Above parameters are measured with the E00/E01 series piezo controller. The maximum driving voltage can be -20V~150V; for high reliability long-term use, the recommended driving voltage is 0~120V.

    Drawings(Click on the picture to enlarge it)
     Downloads
Auto CAD PDF
Step
Specs Sheet
Manual

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