θx θy Z motion

Optional mirror adapter

Integrated Piezo Deflection System

Frequency and Load Curves

Closed-loop Curve

Load Step Time

High Resolution, Stability and Dynamics

P32 is compact and internally assembled with pre-load, high-reliability piezo actuator integrated into complex, flexible hinge guidance system that is modeled and analyzed by FEA. Piezoelectric actuators are stacked co-fired piezoelectric ceramics that provide better performance and reliability than conventional piezoelectric actuators.
P32 uses a parallel-kinetic direct-drive tripod structure that provides optimum angular stability over a wide temperature range. This design has the advantages of smaller size, the same tilt range and dynamic performance of the two axes, faster response speed and better linearity, and also prevents polarization rotation, making it ideal for industrial applications.

Driving Principle

P32 piezo tip/tilt and Z platform is designed based on the mechanism drived by three piezo actuators that are placed at an angle intervals of 120°. In addition to tilting motion, this structural design also enables linear movement of the Z-direction, which can be used to correct the optical path length. In below drawing, A, B, C represent the measured displacement at the points, and the simple calculation formulas of the two-axis tilt angle and Z-direction displacement are as follows.