P33 Piezo Tip/Tilt Platform is a deflection platform with fast response and compact size. It provides high-precision angular motion of the top platform. Compared with other actuators, the flexible hinge-guided piezoelectric deflection platform provides higher acceleration. The step response time is in the sub-millisecond range. The closed loop and open loop versions have 6 different deflection ranges and beam deflections up to 20mrad.
Characteristics
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θx θy tilt motion ![]() |
Appearance ![]() |
Moving part ![]() |
Load Step Time P33.T8S FSM with 50g load up to 100% tilt range, step time of about 40ms. ![]() |
High Precision with Positioner
Strain sensors are used at appropriate locations in the mechanical structure for high stability and positioning accuracy. They provide higher bandwidth and send position feedback signals to the controller. The sensors are connected in a bridge configuration to eliminate thermal drift and ensure high quality, stability. |
High Precision with Positioner ![]() |
Frequency and Load Curves ![]() |
Measuring ![]() |
Measuring ![]() |
Applications
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Technical data | ||||||||
Models |
P33.T2SF/Y P33.T2KF/Y |
P33.T4SF/Y P33.T4KF/Y |
P33.T5SF/Y P33.T5KF/Y |
P33.T6SF/Y P33.T6KF/Y |
P33.T8SF/Y P33.T8KF/Y |
Units |
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Active axis |
θx、θy |
θx、θy |
θx、θy |
θx、θy |
θx、θy |
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Drive control |
3 driving channels 2 sensing channels |
3 driving channels 2 sensing channels |
3 driving channels 2 sensing channels |
3 driving channels 2 sensing channels |
3 driving channels 2 sensing channels |
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Tilt angle(0~100V)
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2或±1(≈206") |
4或±2(≈412")
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5.6或±2.8(≈577")
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6.2或±3.1(≈639")
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8.2或±4.1(≈845")
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mrad±10% |
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Max.tilt angle(0~120V)
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2.5或±1.25(≈257")
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5或±2.5(≈515")
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6.8或±3.4(≈701")
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7.5或±3.75(≈773")
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10或±5(≈1031")
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mrad±10% |
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Sensor type |
SGS/- |
SGS/- |
SGS/- |
SGS/- |
SGS/- |
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Closed/open loop Resolution |
0.05(≈0.01") 0.02(<0.01") |
0.15(≈0.03") 0.04(≈0.01") |
0.2(≈0.04") 0.05(≈0.01") |
0.25(≈0.05") 0.1(≈0.02") |
0.3(≈0.06") 0.1(≈0.02") |
μrad |
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Linearity |
0.1/- |
0.2/- |
0.25/- |
0.25/- |
0.25/- |
%F.S. |
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Repeatability |
0.02/- |
0.02/- |
0.02/- |
0.02/- |
0.02/- |
%F.S. |
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Unloaded resonant frequency |
3.7 |
3.4 |
3.3 |
3.2 |
3.1 |
kHz±20% |
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Unloaded step time |
1.5/1 |
3/2 |
5/2.5 |
6/3.5 |
8/4 |
ms±20% |
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Capacitance |
3.6/axis |
7.2/axis |
9/axis |
11/axis |
14.5/axis |
μF±20% |
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Material |
Steel/Ti |
Steel |
Steel |
Steel |
Steel |
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Mass |
190/125 |
240 |
265 |
290 |
340 |
g±5% |
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Platform Length L |
37 |
55 |
64 |
73 |
91 |
mm |
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Curves |
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STEP:Waist fixed |
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STEP:Bottom fixed |
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Specs Sheet |
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Note: The standard material is steel, if you need titanium alloy material, please contact the sales engineer. Technical data is measured by CoreMorrow E00/E01 series piezo controller. Max driving voltage could be -20V~150V, 0~120V is recommended for long-term and high-reliable operation.
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