- Introduction
- Controllers
- Feedback
S22 series Piezo Tip/Tilt Platform is a one-dimensional θx axis deflection platform. The flexible hinge guiding design has zero friction and static resistance, excellent guiding precision, nano-radian resolution and excellent positioning stability. With a beam deflection range of up to 6mrad, it has an extremely fast response speed (milliseconds to microseconds) and is ideal for dynamic operation (eg tracking, scanning, drift and vibration cancellation) and positioning of optics and samples.
Characteristics
|
|
|
|
|
|
Frequency and Load Curves 
|
Appearance 
|
Moving part 
|
|
Small Size, High Dynamic, Open/Closed-Loop
S22 Piezo tip/tilt platform (also called fast mirror/tilt mirror, beam deflection, phase shifter) provides higher acceleration and bandwidth than voice coil motor products, with a θx axis deflection range of 3mrad and a deflection resolution of 0.1μrad, and optional open or closed loop control, and the optional closed-loop sensor includes a strain sensor and a capacitive sensor for higher positioning accuracy. |
Principle The platform is supported by one hinge and is pushed by a linear piezo actuator. The hinge defines the pivot point and serves to apply a preload to the piezoelectric actuator. The single hinge and single actuator design has the advantages of simple structure, small size, and high cost performance. If the operating environment temperature varies widely during angular deflection, it is recommended to use a differential drive piezoelectric deflection platform. 
|
Applications
|
|
|
|
|
|
|
|
|
|
| Technical data | ||||
|
Models |
S - closed loop |
S22.U3S |
S22.U3K |
Units |
|
Active axis |
θx |
θx |
|
|
|
Drive control |
θ1 driving channel 1 sensing channel |
θ1 driving channel |
|
|
|
Tilt angle（0~120V） |
2.5（≈520"） |
2.5（≈520"） |
mrad±20% |
|
|
Max.tilt angle（0~150V） |
3（≈610"） |
3（≈610"） |
mrad±20% |
|
|
Sensor type |
SGS |
- |
|
|
|
Resolution |
0.08（≈0.02"） |
0.03（≈0.01"） |
μrad |
|
|
Linearity |
0.2 |
- |
%F.S. |
|
|
Repeatability |
0.15 |
- |
%F.S. |
|
|
Unloaded resonant frequency |
3 |
3 |
kHz±20% |
|
|
Unloaded step time |
3 |
0.8 |
ms±20% |
|
|
El.capacitance |
1.8 |
1.8 |
μF±20% |
|
|
Material |
Steel |
Steel |
|
|
|
Mass |
80 |
80 |
g±5% |
|
Note: Above parameters are measured with the E00/E01 series piezo controller. The maximum driving voltage can be -20V~150V; for high reliability long-term use, the recommended driving voltage is 0~120V.
Sweep, get the latest information on core tomorrow
Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
