- Introduction
- Controllers
- Feedback
P92.X40 fast tool positioning stage is driven by high-voltage piezoelectric actuator, the driving voltage is 0~1000V, and the blocking force can reach 3000N.
Characteristics
|
|
|
|
|
|
|
|
Closed loop resolution 10nm 
|
Closed loop accuracy curve 
|
Closed loop resolution 
|
|
Gain 
|
Phase 
|
Temperature rise 
|
|
Temperature rise@1kHz, 1μm 
|
Temperature rise@500Hz, 5μm 
|
Temperature rise@200Hz, 400V 
|
| Technical data | |||
|
Models |
|
P92.X40S P92.X40K |
Units |
|
Active axis |
X |
|
|
|
Drive control |
1 driving channel 1 sensing channel |
|
|
|
Travel range(0-800V) |
32 |
µm±10% |
|
|
Max.travel range(0-1000V) |
40 |
µm±10% |
|
|
Integrated sensor |
SGS |
|
|
|
Closed loop resolution |
1.5/0.5 |
nm |
|
|
Lag phase(1μm/1Khz) |
<20 |
° ±20% |
|
|
Lag phase(5μm/500hz) |
<10 |
° ±20% |
|
|
Push force |
3000 |
N |
|
|
Stiffness |
100 |
N/µm±20% |
|
|
Unloaded resonant frequency |
3975 |
Hz±20% |
|
|
Closed-loop linearity |
<0.1 |
%F.S. |
|
|
Repeatability |
<0.1 |
%F.S. |
|
|
Electrical capacitance |
540 |
nF±20% |
|
|
Operating temperature* |
10-50 |
°C |
|
|
Material |
Steel |
|
|
|
Cable length |
1.5, customizable |
m±10mm |
|
|
Mass |
2780 |
g±5% |
|
|
Connector** |
LEMO |
||
|
Load capacity |
Horizontal |
0.3 | kg |
|
Vertical |
0.5 | ||
|
Inverted |
0.3 | ||
* Custom ultralow temperature and ultrahigh vacuum versions are available.
**Custom connector is available.
Note: The parallelism of the moving platform is about 20 μm, and the roughness is about 1.6 to 3.2. Please contact the sales engineer for confirmation before purchase.
| Mounting Method |
Horizontal Mounting |
Vertical Mounting |
Inverted Mounting |
| Definition |
Place the PZT platform horizontally for installation, with the moving surface located above the PZT platform and parallel to the horizontal plane.
PS: Default direction for carrying capacity in the parameter table
|
Place and install the PZT platform vertically, with the moving surface parallel to the direction of gravity
|
Place the PZT platform horizontally, but the moving surface is located below the PZT platform |
| Diagram |
 |
 |
 |
| Note |
When the mounting method is selected as vertical mounting, pay attention to the outlet port |
||
Recommended Controller
|
|
|
|
Sweep, get the latest information on core tomorrow
Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
