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P92.X40 fast tool positioning stage is driven by high-voltage piezoelectric actuator, the driving voltage is 0~1000V, and the blocking force can reach 3000N.
Characteristics
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Closed loop resolution 10nm 
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Closed loop accuracy curve 
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Closed loop resolution 
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Gain 
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Phase 
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Temperature rise 
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Temperature rise@1kHz, 1μm 
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Temperature rise@500Hz, 5μm 
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Temperature rise@200Hz, 400V 
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| Technical data | ||
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Models |
P92.X40S P92.X40K |
Units |
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Active axis |
X |
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Drive control |
1 driving channel 1 sensing channel |
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Travel range(0-800V) |
32 |
µm±10% |
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Travel range(0-1000V) |
40 |
µm±10% |
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Integrated sensor |
SGS |
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Lag phase(1μm/1Khz) |
<20 |
° ±20% |
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Lag phase(5μm/500hz) |
<10 |
° ±20% |
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Push force |
3000 |
N |
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Stiffness |
100 |
N/µm±20% |
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Unloaded resonant frequency |
3975 |
Hz±20% |
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Closed-loop linearity |
<0.1 |
%F.S. |
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Repeatability |
<0.1 |
%F.S. |
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Closed loop resolution |
1.5/0.5 |
nm |
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Electrical capacitance |
540 |
nF±20% |
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Operating temperature* |
10-50 |
°C |
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Material |
Steel |
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Cable length |
1.5, customizable |
m±10mm |
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Mass |
2780 |
g±5% |
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Connector** |
LEMO |
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* Custom ultralow temperature and ultrahigh vacuum versions are available.
**Custom connector is available.
Note: The parallelism of the moving platform is about 20 μm, and the roughness is about 1.6 to 3.2. Please contact the sales engineer for confirmation before purchase.
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Address：1F, Building I2, No.191 Xuefu Road, Nangang District, Harbin, China
Tel：0451-86268790
Piezo · Nano · Motion
